We propose miniature KrCl and XeBr excimer lamps based on a near-surface capacitive discharge. We show that the devices have high specific energy characteristics (radiation power density of up to 7 mW/cm2), a small emitting volume with a stable position in space, and a narrow radiation band.
|Number of pages||4|
|Journal||Journal of Applied Spectroscopy|
|Publication status||Published - 1 Sep 2003|
- Miniature excimer lamps
- Near-surface capacitive discharge
ASJC Scopus subject areas
- Condensed Matter Physics