Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering

Irina Bozhko, Evgeniya Rybalko, Anastasiya Pershukova, Marina Fedorischeva, Yurii Khristenko, Victor Sergeev

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
JournalAIP Conference Proceedings
Volume1772
DOIs
Publication statusPublished - 13 Oct 2016

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