Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering

Irina Bozhko, Evgeniya Rybalko, Anastasiya Pershukova, Marina Fedorischeva, Marina Fedorischeva, Yurii Khristenko, Victor Sergeev

Research output: Contribution to journalArticle

Original languageEnglish
JournalAIP Conference Proceedings
Volume1772
DOIs
Publication statusPublished - 13 Oct 2016

Cite this

Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering. / Bozhko, Irina; Rybalko, Evgeniya; Pershukova, Anastasiya; Fedorischeva, Marina; Fedorischeva, Marina; Khristenko, Yurii; Sergeev, Victor.

In: AIP Conference Proceedings, Vol. 1772, 13.10.2016.

Research output: Contribution to journalArticle

Bozhko, Irina ; Rybalko, Evgeniya ; Pershukova, Anastasiya ; Fedorischeva, Marina ; Fedorischeva, Marina ; Khristenko, Yurii ; Sergeev, Victor. / Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering. In: AIP Conference Proceedings. 2016 ; Vol. 1772.
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