Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering

V. I. Ivashchenko, V. M. Rogoz, T. N. Koltunowicz, A. I. Kupchishin

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline.

Original languageEnglish
Title of host publicationLecture Notes in Mechanical Engineering
PublisherPleiades Publishing
Pages51-60
Number of pages10
DOIs
Publication statusPublished - 1 Jan 2019
Externally publishedYes

Publication series

NameLecture Notes in Mechanical Engineering
ISSN (Print)2195-4356
ISSN (Electronic)2195-4364

Keywords

  • Coatings
  • Mechanical properties
  • Multilayers
  • XRD investigation

ASJC Scopus subject areas

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

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