Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering

V. I. Ivashchenko, V. M. Rogoz, T. N. Koltunowicz, A. I. Kupchishin

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline.

Original languageEnglish
Title of host publicationLecture Notes in Mechanical Engineering
PublisherPleiades Publishing
Pages51-60
Number of pages10
DOIs
Publication statusPublished - 1 Jan 2019
Externally publishedYes

Publication series

NameLecture Notes in Mechanical Engineering
ISSN (Print)2195-4356
ISSN (Electronic)2195-4364

Fingerprint

Sputtering
Fluxes
Coatings
Mechanical properties
Microstructure
Hardness
Oxidation resistance
Magnetron sputtering
Elastic moduli
Modulation
Substrates

Keywords

  • Coatings
  • Mechanical properties
  • Multilayers
  • XRD investigation

ASJC Scopus subject areas

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Cite this

Ivashchenko, V. I., Rogoz, V. M., Koltunowicz, T. N., & Kupchishin, A. I. (2019). Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering. In Lecture Notes in Mechanical Engineering (pp. 51-60). (Lecture Notes in Mechanical Engineering). Pleiades Publishing. https://doi.org/10.1007/978-981-13-6133-3_5

Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering. / Ivashchenko, V. I.; Rogoz, V. M.; Koltunowicz, T. N.; Kupchishin, A. I.

Lecture Notes in Mechanical Engineering. Pleiades Publishing, 2019. p. 51-60 (Lecture Notes in Mechanical Engineering).

Research output: Chapter in Book/Report/Conference proceedingChapter

Ivashchenko, VI, Rogoz, VM, Koltunowicz, TN & Kupchishin, AI 2019, Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering. in Lecture Notes in Mechanical Engineering. Lecture Notes in Mechanical Engineering, Pleiades Publishing, pp. 51-60. https://doi.org/10.1007/978-981-13-6133-3_5
Ivashchenko VI, Rogoz VM, Koltunowicz TN, Kupchishin AI. Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering. In Lecture Notes in Mechanical Engineering. Pleiades Publishing. 2019. p. 51-60. (Lecture Notes in Mechanical Engineering). https://doi.org/10.1007/978-981-13-6133-3_5
Ivashchenko, V. I. ; Rogoz, V. M. ; Koltunowicz, T. N. ; Kupchishin, A. I. / Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering. Lecture Notes in Mechanical Engineering. Pleiades Publishing, 2019. pp. 51-60 (Lecture Notes in Mechanical Engineering).
@inbook{5bd5c748b9384c66951b3bbe78a932ac,
title = "Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering",
abstract = "Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline.",
keywords = "Coatings, Mechanical properties, Multilayers, XRD investigation",
author = "Ivashchenko, {V. I.} and Rogoz, {V. M.} and Koltunowicz, {T. N.} and Kupchishin, {A. I.}",
year = "2019",
month = "1",
day = "1",
doi = "10.1007/978-981-13-6133-3_5",
language = "English",
series = "Lecture Notes in Mechanical Engineering",
publisher = "Pleiades Publishing",
pages = "51--60",
booktitle = "Lecture Notes in Mechanical Engineering",

}

TY - CHAP

T1 - Microstructure and mechanical properties of multilayered α-aln/α-BCN coatings depending on flux density during target B4C sputtering

AU - Ivashchenko, V. I.

AU - Rogoz, V. M.

AU - Koltunowicz, T. N.

AU - Kupchishin, A. I.

PY - 2019/1/1

Y1 - 2019/1/1

N2 - Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline.

AB - Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline.

KW - Coatings

KW - Mechanical properties

KW - Multilayers

KW - XRD investigation

UR - http://www.scopus.com/inward/record.url?scp=85062444310&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85062444310&partnerID=8YFLogxK

U2 - 10.1007/978-981-13-6133-3_5

DO - 10.1007/978-981-13-6133-3_5

M3 - Chapter

AN - SCOPUS:85062444310

T3 - Lecture Notes in Mechanical Engineering

SP - 51

EP - 60

BT - Lecture Notes in Mechanical Engineering

PB - Pleiades Publishing

ER -