Microstructure and Mechanical Properties of Multilayer α-AlN/α-BCN Coating as Functions of the Current Density during Sputtering of a B 4 C Target

A. D. Pogrebnyak, V. I. Ivashchenko, N. K. Erdybaeva, A. I. Kupchishin, M. A. Lisovenko

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Multilayer AlN/BCN coating of nanometer scale have been prepared by magnetron sputtering of Al and B 4 C targets in an argon–nitrogen atmosphere during deposition on a Si substrate. These coating have an X-ray amorphous structure and the maximum Knoop hardness of 27 GPa (at the current density 100 mA). The first-principle molecular dynamics calculations show that the B4–BN layer is dynamically unstable; thus, it will not be epitaxial and will be amorphous or have a structure different from the B4–BN structure. The thermal vacuum annealing from 600 to 800°C of samples with multilayer nanosized coating leads to the decrease in the Knoop hardness to 18 GPa; however, the coating structure is retained X-ray amorphous.

Original languageEnglish
Pages (from-to)2030-2033
Number of pages4
JournalPhysics of the Solid State
Volume60
Issue number10
DOIs
Publication statusPublished - 1 Oct 2018
Externally publishedYes

Fingerprint

Sputtering
Multilayers
Current density
sputtering
Knoop hardness
mechanical properties
current density
coatings
Coatings
Mechanical properties
microstructure
Microstructure
Hardness
X rays
Magnetron sputtering
Molecular dynamics
magnetron sputtering
x rays
Vacuum
Annealing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Microstructure and Mechanical Properties of Multilayer α-AlN/α-BCN Coating as Functions of the Current Density during Sputtering of a B 4 C Target. / Pogrebnyak, A. D.; Ivashchenko, V. I.; Erdybaeva, N. K.; Kupchishin, A. I.; Lisovenko, M. A.

In: Physics of the Solid State, Vol. 60, No. 10, 01.10.2018, p. 2030-2033.

Research output: Contribution to journalArticle

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