Microstructure and Mechanical Properties of Multilayer α-AlN/α-BCN Coating as Functions of the Current Density during Sputtering of a B 4 C Target

A. D. Pogrebnyak, V. I. Ivashchenko, N. K. Erdybaeva, A. I. Kupchishin, M. A. Lisovenko

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Multilayer AlN/BCN coating of nanometer scale have been prepared by magnetron sputtering of Al and B 4 C targets in an argon–nitrogen atmosphere during deposition on a Si substrate. These coating have an X-ray amorphous structure and the maximum Knoop hardness of 27 GPa (at the current density 100 mA). The first-principle molecular dynamics calculations show that the B4–BN layer is dynamically unstable; thus, it will not be epitaxial and will be amorphous or have a structure different from the B4–BN structure. The thermal vacuum annealing from 600 to 800°C of samples with multilayer nanosized coating leads to the decrease in the Knoop hardness to 18 GPa; however, the coating structure is retained X-ray amorphous.

Original languageEnglish
Pages (from-to)2030-2033
Number of pages4
JournalPhysics of the Solid State
Volume60
Issue number10
DOIs
Publication statusPublished - 1 Oct 2018
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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