Microelectromechanical accelerometer under mechanical impact conditions

Abstract

The paper presents the effect of mechanical impact on the multiple-axis microelectromechanical system (MEMS) accelerometer. The parameters of accelerometer and its impact load allow considering the impact to be long and displacements induced by this impact to be quasi-static. The impact load results in a contact interaction between the movable and stationary elements of the structure. To prevent the contact interaction, the limit stops are installed in accelerometer. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results are achieved for the displacement and stress values of accelerometer.

Original language	English
Title of host publication	2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781467383837
DOIs	https://doi.org/10.1109/SIBCON.2016.7491845
Publication status	Published - 14 Jun 2016
Event	2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Moscow, Russian Federation Duration: 12 May 2016 → 14 May 2016

Conference

Conference	2016 International Siberian Conference on Control and Communications, SIBCON 2016
Country	Russian Federation
City	Moscow
Period	12.5.16 → 14.5.16

Keywords

contact interaction
impact pulse
Internet of Things
limit stops
microelectromechanical accelerometer

ASJC Scopus subject areas

Signal Processing
Control and Systems Engineering
Electrical and Electronic Engineering
Modelling and Simulation
Computer Networks and Communications

Access to Document

10.1109/SIBCON.2016.7491845

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Cite this

Nesterenko, T., Barbin, E. S., Koleda, A., & Zorina, E. (2016). Microelectromechanical accelerometer under mechanical impact conditions. In 2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Proceedings [7491845] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SIBCON.2016.7491845

Microelectromechanical accelerometer under mechanical impact conditions. / Nesterenko, T.; Barbin, Evgenii Sergeevich; Koleda, A.; Zorina, E.

2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. 7491845.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nesterenko, T, Barbin, ES, Koleda, A & Zorina, E 2016, Microelectromechanical accelerometer under mechanical impact conditions. in 2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Proceedings., 7491845, Institute of Electrical and Electronics Engineers Inc., 2016 International Siberian Conference on Control and Communications, SIBCON 2016, Moscow, Russian Federation, 12.5.16. https://doi.org/10.1109/SIBCON.2016.7491845

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abstract = "The paper presents the effect of mechanical impact on the multiple-axis microelectromechanical system (MEMS) accelerometer. The parameters of accelerometer and its impact load allow considering the impact to be long and displacements induced by this impact to be quasi-static. The impact load results in a contact interaction between the movable and stationary elements of the structure. To prevent the contact interaction, the limit stops are installed in accelerometer. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results are achieved for the displacement and stress values of accelerometer.",

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