Abstract
The paper presents the effect of mechanical impact on the multiple-axis microelectromechanical system (MEMS) accelerometer. The parameters of accelerometer and its impact load allow considering the impact to be long and displacements induced by this impact to be quasi-static. The impact load results in a contact interaction between the movable and stationary elements of the structure. To prevent the contact interaction, the limit stops are installed in accelerometer. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results are achieved for the displacement and stress values of accelerometer.
Original language | English |
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Title of host publication | 2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781467383837 |
DOIs | |
Publication status | Published - 14 Jun 2016 |
Event | 2016 International Siberian Conference on Control and Communications, SIBCON 2016 - Moscow, Russian Federation Duration: 12 May 2016 → 14 May 2016 |
Conference
Conference | 2016 International Siberian Conference on Control and Communications, SIBCON 2016 |
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Country | Russian Federation |
City | Moscow |
Period | 12.5.16 → 14.5.16 |
Keywords
- contact interaction
- impact pulse
- Internet of Things
- limit stops
- microelectromechanical accelerometer
ASJC Scopus subject areas
- Signal Processing
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Modelling and Simulation
- Computer Networks and Communications