Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

Original languageEnglish
Title of host publicationXXI IMEKO World Congress "Measurement in Research and Industry"
PublisherIMEKO-International Measurement Federation Secretariat
Publication statusPublished - 2015
Event21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic
Duration: 30 Aug 20154 Sep 2015

Other

Other21st IMEKO World Congress on Measurement in Research and Industry
CountryCzech Republic
CityPrague
Period30.8.154.9.15

Keywords

  • Elastic suspension
  • MEMS-based accelerometer
  • Moving mass
  • Temperature sensitivity
  • Thermal errors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Nesterenko, T. G., Barbin, E. S., Koleda, A. N., & Arshinova, A. A. (2015). Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. In XXI IMEKO World Congress "Measurement in Research and Industry" IMEKO-International Measurement Federation Secretariat.