Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

Original languageEnglish
Title of host publicationXXI IMEKO World Congress "Measurement in Research and Industry"
PublisherIMEKO-International Measurement Federation Secretariat
Publication statusPublished - 2015
Event21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic
Duration: 30 Aug 20154 Sep 2015

Other

Other21st IMEKO World Congress on Measurement in Research and Industry
CountryCzech Republic
CityPrague
Period30.8.154.9.15

Fingerprint

Accelerometers
Thermal effects
MEMS
Temperature

Keywords

  • Elastic suspension
  • MEMS-based accelerometer
  • Moving mass
  • Temperature sensitivity
  • Thermal errors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Nesterenko, T. G., Barbin, E. S., Koleda, A. N., & Arshinova, A. A. (2015). Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. In XXI IMEKO World Congress "Measurement in Research and Industry" IMEKO-International Measurement Federation Secretariat.

Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. / Nesterenko, Tamara G.; Barbin, Evgeniy S.; Koleda, Aleksey N.; Arshinova, Alisa A.

XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nesterenko, TG, Barbin, ES, Koleda, AN & Arshinova, AA 2015, Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. in XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 21st IMEKO World Congress on Measurement in Research and Industry, Prague, Czech Republic, 30.8.15.
Nesterenko TG, Barbin ES, Koleda AN, Arshinova AA. Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. In XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat. 2015
Nesterenko, Tamara G. ; Barbin, Evgeniy S. ; Koleda, Aleksey N. ; Arshinova, Alisa A. / Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.
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