Abstract
Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
| Original language | English |
|---|---|
| Title of host publication | XXI IMEKO World Congress "Measurement in Research and Industry" |
| Publisher | IMEKO-International Measurement Federation Secretariat |
| Publication status | Published - 2015 |
| Event | 21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic Duration: 30 Aug 2015 → 4 Sep 2015 |
Other
| Other | 21st IMEKO World Congress on Measurement in Research and Industry |
|---|---|
| Country | Czech Republic |
| City | Prague |
| Period | 30.8.15 → 4.9.15 |
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Keywords
- Elastic suspension
- MEMS-based accelerometer
- Moving mass
- Temperature sensitivity
- Thermal errors
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. / Nesterenko, Tamara G.; Barbin, Evgeniy S.; Koleda, Aleksey N.; Arshinova, Alisa A.
XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect
AU - Nesterenko, Tamara G.
AU - Barbin, Evgeniy S.
AU - Koleda, Aleksey N.
AU - Arshinova, Alisa A.
PY - 2015
Y1 - 2015
N2 - Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
AB - Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
KW - Elastic suspension
KW - MEMS-based accelerometer
KW - Moving mass
KW - Temperature sensitivity
KW - Thermal errors
UR - http://www.scopus.com/inward/record.url?scp=84951139008&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84951139008&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84951139008
BT - XXI IMEKO World Congress "Measurement in Research and Industry"
PB - IMEKO-International Measurement Federation Secretariat
ER -