Abstract
Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
| Original language | English |
|---|---|
| Title of host publication | XXI IMEKO World Congress "Measurement in Research and Industry" |
| Publisher | IMEKO-International Measurement Federation Secretariat |
| Publication status | Published - 2015 |
| Event | 21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic Duration: 30 Aug 2015 → 4 Sep 2015 |
Other
| Other | 21st IMEKO World Congress on Measurement in Research and Industry |
|---|---|
| Country | Czech Republic |
| City | Prague |
| Period | 30.8.15 → 4.9.15 |
Keywords
- Elastic suspension
- MEMS-based accelerometer
- Moving mass
- Temperature sensitivity
- Thermal errors
ASJC Scopus subject areas
- Electrical and Electronic Engineering
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Cite this
Nesterenko, T. G., Barbin, E. S., Koleda, A. N., & Arshinova, A. A. (2015). Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. In XXI IMEKO World Congress "Measurement in Research and Industry" IMEKO-International Measurement Federation Secretariat.