Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

Abstract

Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

Original language	English
Title of host publication	XXI IMEKO World Congress "Measurement in Research and Industry"
Publisher	IMEKO-International Measurement Federation Secretariat
Publication status	Published - 2015
Event	21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic Duration: 30 Aug 2015 → 4 Sep 2015

Other

Other	21st IMEKO World Congress on Measurement in Research and Industry
Country	Czech Republic
City	Prague
Period	30.8.15 → 4.9.15

Keywords

Elastic suspension
MEMS-based accelerometer
Moving mass
Temperature sensitivity
Thermal errors

ASJC Scopus subject areas

Electrical and Electronic Engineering

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Cite this

Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. / Nesterenko, Tamara G.; Barbin, Evgeniy S.; Koleda, Aleksey N.; Arshinova, Alisa A.

XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nesterenko, TG, Barbin, ES, Koleda, AN & Arshinova, AA 2015, Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. in XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 21st IMEKO World Congress on Measurement in Research and Industry, Prague, Czech Republic, 30.8.15.

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keywords = "Elastic suspension, MEMS-based accelerometer, Moving mass, Temperature sensitivity, Thermal errors",

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KW - Elastic suspension

KW - MEMS-based accelerometer

KW - Moving mass

KW - Temperature sensitivity

KW - Thermal errors

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T2 - 21st IMEKO World Congress on Measurement in Research and Industry

Y2 - 30 August 2015 through 4 September 2015