Metal vapor vacuum arc ion sources "Raduga"

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

Original languageEnglish
Pages (from-to)3126-3133
Number of pages8
JournalReview of Scientific Instruments
Volume65
Issue number10
DOIs
Publication statusPublished - 1994

Fingerprint

metal vapors
Ion sources
ion sources
arcs
Vapors
Vacuum
vacuum
pulses
Metals
Plasma deposition
Ions
Ion bombardment
ion irradiation
Ion implantation
Ion beams
implantation
ions
ion beams
Fluxes
Plasmas

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

Cite this

Metal vapor vacuum arc ion sources "Raduga". / Ryabchikov, A. I.; Dektjarev, S. V.; Stepanov, I. B.

In: Review of Scientific Instruments, Vol. 65, No. 10, 1994, p. 3126-3133.

Research output: Contribution to journalArticle

@article{9f1201d5ccd3492b8fe86cef7593582a,
title = "Metal vapor vacuum arc ion sources {"}Raduga{"}",
abstract = "A brief review is presented of the {"}Raduga{"} 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.",
author = "Ryabchikov, {A. I.} and Dektjarev, {S. V.} and Stepanov, {I. B.}",
year = "1994",
doi = "10.1063/1.1144766",
language = "English",
volume = "65",
pages = "3126--3133",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "10",

}

TY - JOUR

T1 - Metal vapor vacuum arc ion sources "Raduga"

AU - Ryabchikov, A. I.

AU - Dektjarev, S. V.

AU - Stepanov, I. B.

PY - 1994

Y1 - 1994

N2 - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

AB - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

UR - http://www.scopus.com/inward/record.url?scp=0039057091&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0039057091&partnerID=8YFLogxK

U2 - 10.1063/1.1144766

DO - 10.1063/1.1144766

M3 - Article

VL - 65

SP - 3126

EP - 3133

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 10

ER -