Abstract
A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.
| Original language | English |
|---|---|
| Pages (from-to) | 3126-3133 |
| Number of pages | 8 |
| Journal | Review of Scientific Instruments |
| Volume | 65 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 1994 |
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ASJC Scopus subject areas
- Instrumentation
- Physics and Astronomy (miscellaneous)
Cite this
Metal vapor vacuum arc ion sources "Raduga". / Ryabchikov, A. I.; Dektjarev, S. V.; Stepanov, I. B.
In: Review of Scientific Instruments, Vol. 65, No. 10, 1994, p. 3126-3133.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Metal vapor vacuum arc ion sources "Raduga"
AU - Ryabchikov, A. I.
AU - Dektjarev, S. V.
AU - Stepanov, I. B.
PY - 1994
Y1 - 1994
N2 - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.
AB - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.
UR - http://www.scopus.com/inward/record.url?scp=0039057091&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0039057091&partnerID=8YFLogxK
U2 - 10.1063/1.1144766
DO - 10.1063/1.1144766
M3 - Article
AN - SCOPUS:0039057091
VL - 65
SP - 3126
EP - 3133
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
SN - 0034-6748
IS - 10
ER -