Metal vapor vacuum arc ion sources "Raduga"

Abstract

A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

Original language	English
Pages (from-to)	3126-3133
Number of pages	8
Journal	Review of Scientific Instruments
Volume	65
Issue number	10
DOIs	https://doi.org/10.1063/1.1144766
Publication status	Published - 1994

ASJC Scopus subject areas

Instrumentation
Physics and Astronomy (miscellaneous)

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10.1063/1.1144766

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@article{9f1201d5ccd3492b8fe86cef7593582a,

title = "Metal vapor vacuum arc ion sources {"}Raduga{"}",

abstract = "A brief review is presented of the {"}Raduga{"} 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.",

author = "Ryabchikov, {A. I.} and Dektjarev, {S. V.} and Stepanov, {I. B.}",

year = "1994",

doi = "10.1063/1.1144766",

language = "English",

volume = "65",

pages = "3126--3133",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "10",

}

TY - JOUR

T1 - Metal vapor vacuum arc ion sources "Raduga"

AU - Ryabchikov, A. I.

AU - Dektjarev, S. V.

AU - Stepanov, I. B.

PY - 1994

Y1 - 1994

N2 - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

AB - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

UR - http://www.scopus.com/inward/record.url?scp=0039057091&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0039057091&partnerID=8YFLogxK

U2 - 10.1063/1.1144766

DO - 10.1063/1.1144766

M3 - Article

AN - SCOPUS:0039057091

VL - 65

SP - 3126

EP - 3133

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 10

ER -

Metal vapor vacuum arc ion sources "Raduga"

Abstract

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