Metal vapor vacuum arc ion sources "Raduga"

Abstract

A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

Original language	English
Pages (from-to)	3126-3133
Number of pages	8
Journal	Review of Scientific Instruments
Volume	65
Issue number	10
DOIs	https://doi.org/10.1063/1.1144766
Publication status	Published - 1994

ASJC Scopus subject areas

Instrumentation
Physics and Astronomy (miscellaneous)

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10.1063/1.1144766

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Ryabchikov, A. I., Dektjarev, S. V., & Stepanov, I. B. (1994). Metal vapor vacuum arc ion sources "Raduga". Review of Scientific Instruments, 65(10), 3126-3133. https://doi.org/10.1063/1.1144766

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AB - A brief review is presented of the "Raduga" 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

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