@inproceedings{3db7f32d59a54b2d84142da1a3966568,
title = "Metal surface treatment with particle fluxes taking into account the internal boundary",
abstract = "In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.",
keywords = "Coupled model, Deformation, Diffusion, Internal boundary, Ion implantation, Numerical solution, Phase",
author = "Parfenova, {E. S.} and Knyazeva, {A. G.}",
year = "2016",
doi = "10.4028/www.scientific.net/KEM.685.413",
language = "English",
isbn = "9783038357087",
volume = "685",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "413--416",
booktitle = "Key Engineering Materials",
note = "4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 ; Conference date: 21-04-2015 Through 24-04-2015",
}