Abstract
In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
| Original language | English |
|---|---|
| Title of host publication | Key Engineering Materials |
| Publisher | Trans Tech Publications Ltd |
| Pages | 413-416 |
| Number of pages | 4 |
| Volume | 685 |
| ISBN (Print) | 9783038357087 |
| DOIs | |
| Publication status | Published - 2016 |
| Event | 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation Duration: 21 Apr 2015 → 24 Apr 2015 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 685 |
| ISSN (Print) | 10139826 |
Other
| Other | 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 21.4.15 → 24.4.15 |
Fingerprint
Keywords
- Coupled model
- Deformation
- Diffusion
- Internal boundary
- Ion implantation
- Numerical solution
- Phase
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
Cite this
Metal surface treatment with particle fluxes taking into account the internal boundary. / Parfenova, E. S.; Knyazeva, A. G.
Key Engineering Materials. Vol. 685 Trans Tech Publications Ltd, 2016. p. 413-416 (Key Engineering Materials; Vol. 685).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Metal surface treatment with particle fluxes taking into account the internal boundary
AU - Parfenova, E. S.
AU - Knyazeva, A. G.
PY - 2016
Y1 - 2016
N2 - In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
AB - In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
KW - Coupled model
KW - Deformation
KW - Diffusion
KW - Internal boundary
KW - Ion implantation
KW - Numerical solution
KW - Phase
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UR - http://www.scopus.com/inward/citedby.url?scp=84958212350&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.685.413
DO - 10.4028/www.scientific.net/KEM.685.413
M3 - Conference contribution
SN - 9783038357087
VL - 685
T3 - Key Engineering Materials
SP - 413
EP - 416
BT - Key Engineering Materials
PB - Trans Tech Publications Ltd
ER -