Abstract
In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
| Original language | English |
|---|---|
| Title of host publication | Key Engineering Materials |
| Publisher | Trans Tech Publications Ltd |
| Pages | 413-416 |
| Number of pages | 4 |
| Volume | 685 |
| ISBN (Print) | 9783038357087 |
| DOIs | |
| Publication status | Published - 2016 |
| Event | 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation Duration: 21 Apr 2015 → 24 Apr 2015 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 685 |
| ISSN (Print) | 10139826 |
Other
| Other | 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 21.4.15 → 24.4.15 |
Keywords
- Coupled model
- Deformation
- Diffusion
- Internal boundary
- Ion implantation
- Numerical solution
- Phase
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
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Cite this
Parfenova, E. S., & Knyazeva, A. G. (2016). Metal surface treatment with particle fluxes taking into account the internal boundary. In Key Engineering Materials (Vol. 685, pp. 413-416). (Key Engineering Materials; Vol. 685). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.685.413