Metal surface treatment with particle fluxes taking into account the internal boundary

E. S. Parfenova, A. G. Knyazeva

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.

Original languageEnglish
Title of host publicationKey Engineering Materials
PublisherTrans Tech Publications Ltd
Pages413-416
Number of pages4
Volume685
ISBN (Print)9783038357087
DOIs
Publication statusPublished - 2016
Event4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation
Duration: 21 Apr 201524 Apr 2015

Publication series

NameKey Engineering Materials
Volume685
ISSN (Print)10139826

Other

Other4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015
CountryRussian Federation
CityTomsk
Period21.4.1524.4.15

Fingerprint

Surface treatment
Metals
Fluxes
Ion implantation
Impurities

Keywords

  • Coupled model
  • Deformation
  • Diffusion
  • Internal boundary
  • Ion implantation
  • Numerical solution
  • Phase

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Parfenova, E. S., & Knyazeva, A. G. (2016). Metal surface treatment with particle fluxes taking into account the internal boundary. In Key Engineering Materials (Vol. 685, pp. 413-416). (Key Engineering Materials; Vol. 685). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.685.413

Metal surface treatment with particle fluxes taking into account the internal boundary. / Parfenova, E. S.; Knyazeva, A. G.

Key Engineering Materials. Vol. 685 Trans Tech Publications Ltd, 2016. p. 413-416 (Key Engineering Materials; Vol. 685).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Parfenova, ES & Knyazeva, AG 2016, Metal surface treatment with particle fluxes taking into account the internal boundary. in Key Engineering Materials. vol. 685, Key Engineering Materials, vol. 685, Trans Tech Publications Ltd, pp. 413-416, 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015, Tomsk, Russian Federation, 21.4.15. https://doi.org/10.4028/www.scientific.net/KEM.685.413
Parfenova ES, Knyazeva AG. Metal surface treatment with particle fluxes taking into account the internal boundary. In Key Engineering Materials. Vol. 685. Trans Tech Publications Ltd. 2016. p. 413-416. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.685.413
Parfenova, E. S. ; Knyazeva, A. G. / Metal surface treatment with particle fluxes taking into account the internal boundary. Key Engineering Materials. Vol. 685 Trans Tech Publications Ltd, 2016. pp. 413-416 (Key Engineering Materials).
@inproceedings{3db7f32d59a54b2d84142da1a3966568,
title = "Metal surface treatment with particle fluxes taking into account the internal boundary",
abstract = "In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.",
keywords = "Coupled model, Deformation, Diffusion, Internal boundary, Ion implantation, Numerical solution, Phase",
author = "Parfenova, {E. S.} and Knyazeva, {A. G.}",
year = "2016",
doi = "10.4028/www.scientific.net/KEM.685.413",
language = "English",
isbn = "9783038357087",
volume = "685",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "413--416",
booktitle = "Key Engineering Materials",

}

TY - GEN

T1 - Metal surface treatment with particle fluxes taking into account the internal boundary

AU - Parfenova, E. S.

AU - Knyazeva, A. G.

PY - 2016

Y1 - 2016

N2 - In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.

AB - In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.

KW - Coupled model

KW - Deformation

KW - Diffusion

KW - Internal boundary

KW - Ion implantation

KW - Numerical solution

KW - Phase

UR - http://www.scopus.com/inward/record.url?scp=84958212350&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84958212350&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/KEM.685.413

DO - 10.4028/www.scientific.net/KEM.685.413

M3 - Conference contribution

SN - 9783038357087

VL - 685

T3 - Key Engineering Materials

SP - 413

EP - 416

BT - Key Engineering Materials

PB - Trans Tech Publications Ltd

ER -