Abstract
Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. Mechanism of the phenomenon is proposed.
Original language | English |
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Title of host publication | International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV |
Pages | 491-494 |
Number of pages | 4 |
Publication status | Published - 2002 |
Event | XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) - Tours, France Duration: 1 Jul 2002 → 5 Jul 2002 |
Other
Other | XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) |
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Country | France |
City | Tours |
Period | 1.7.02 → 5.7.02 |
ASJC Scopus subject areas
- Engineering(all)