Mechanism of the current quenching phenomenon in pseudospark discharge

Yu D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin, K. Frank, R. Bischoff, M. Iberler, J. Urban

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. Mechanism of the phenomenon is proposed.

Original language	English
Title of host publication	International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages	491-494
Number of pages	4
Publication status	Published - 2002
Event	XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) - Tours, France Duration: 1 Jul 2002 → 5 Jul 2002

Other

Other	XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)
Country	France
City	Tours
Period	1.7.02 → 5.7.02

ASJC Scopus subject areas

Engineering(all)

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Mechanism of the current quenching phenomenon in pseudospark discharge. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, N. V.; Shemyakin, I. A.; Frank, K.; Bischoff, R.; Iberler, M.; Urban, J.

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. 2002. p. 491-494.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Korolev, YD, Frants, OB, Geyman, VG, Ivashov, RV, Landl, NV, Shemyakin, IA, Frank, K, Bischoff, R, Iberler, M & Urban, J 2002, Mechanism of the current quenching phenomenon in pseudospark discharge. in International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. pp. 491-494, XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV), Tours, France, 1.7.02.

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title = "Mechanism of the current quenching phenomenon in pseudospark discharge",

abstract = "Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. Mechanism of the phenomenon is proposed.",

author = "Korolev, {Yu D.} and Frants, {O. B.} and Geyman, {V. G.} and Ivashov, {R. V.} and Landl, {N. V.} and Shemyakin, {I. A.} and K. Frank and R. Bischoff and M. Iberler and J. Urban",

year = "2002",

language = "English",

pages = "491--494",

booktitle = "International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV",

note = "XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) ; Conference date: 01-07-2002 Through 05-07-2002",

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AU - Korolev, Yu D.

AU - Frants, O. B.

AU - Geyman, V. G.

AU - Ivashov, R. V.

AU - Landl, N. V.

AU - Shemyakin, I. A.

AU - Frank, K.

AU - Bischoff, R.

AU - Iberler, M.

AU - Urban, J.

PY - 2002

Y1 - 2002

N2 - Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. Mechanism of the phenomenon is proposed.

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M3 - Conference contribution

AN - SCOPUS:0036396260

SP - 491

EP - 494

BT - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

T2 - XXth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)

Y2 - 1 July 2002 through 5 July 2002

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