Abstract
The life of TiN-coated tools can be improved by a post-coating ion implantation treatment, but the mechanism by which this occurs is still not clear. Nitrogen implantation of both physical-vapor-deposited TiN and CVD TiN leads to surface softening as the dose increases, which has been attributed to amorphization. In this study a combination of transmission electron microscopy and atomic force microscopy was used to characterize the microstructure of implanted TiN coatings on cemented carbide for comparison with mechanical property measurements (nanoindentation, residual stress, etc.), made on the same samples. Ion implantation leads to a slight reduction in the grain size of the TiN in the implanted zone, but there is no evidence for amorphization. Surface softening is observed for physical-vapor-deposited TiN, but this is probably due to a combination of changes in surface composition and the presence of a layer of bubbles generated by the very high implantation doses used.
| Original language | English |
|---|---|
| Pages (from-to) | 3293-3303 |
| Number of pages | 11 |
| Journal | Journal of Materials Research |
| Volume | 16 |
| Issue number | 11 |
| Publication status | Published - Nov 2001 |
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ASJC Scopus subject areas
- Materials Science(all)
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Mechanism of improvement of TiN-coated tool life by nitrogen implantation. / Bull, S. J.; Sharkeev, Yu P.; Fortuna, S. V.; Shulepov, I. A.; Perry, A. J.
In: Journal of Materials Research, Vol. 16, No. 11, 11.2001, p. 3293-3303.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Mechanism of improvement of TiN-coated tool life by nitrogen implantation
AU - Bull, S. J.
AU - Sharkeev, Yu P.
AU - Fortuna, S. V.
AU - Shulepov, I. A.
AU - Perry, A. J.
PY - 2001/11
Y1 - 2001/11
N2 - The life of TiN-coated tools can be improved by a post-coating ion implantation treatment, but the mechanism by which this occurs is still not clear. Nitrogen implantation of both physical-vapor-deposited TiN and CVD TiN leads to surface softening as the dose increases, which has been attributed to amorphization. In this study a combination of transmission electron microscopy and atomic force microscopy was used to characterize the microstructure of implanted TiN coatings on cemented carbide for comparison with mechanical property measurements (nanoindentation, residual stress, etc.), made on the same samples. Ion implantation leads to a slight reduction in the grain size of the TiN in the implanted zone, but there is no evidence for amorphization. Surface softening is observed for physical-vapor-deposited TiN, but this is probably due to a combination of changes in surface composition and the presence of a layer of bubbles generated by the very high implantation doses used.
AB - The life of TiN-coated tools can be improved by a post-coating ion implantation treatment, but the mechanism by which this occurs is still not clear. Nitrogen implantation of both physical-vapor-deposited TiN and CVD TiN leads to surface softening as the dose increases, which has been attributed to amorphization. In this study a combination of transmission electron microscopy and atomic force microscopy was used to characterize the microstructure of implanted TiN coatings on cemented carbide for comparison with mechanical property measurements (nanoindentation, residual stress, etc.), made on the same samples. Ion implantation leads to a slight reduction in the grain size of the TiN in the implanted zone, but there is no evidence for amorphization. Surface softening is observed for physical-vapor-deposited TiN, but this is probably due to a combination of changes in surface composition and the presence of a layer of bubbles generated by the very high implantation doses used.
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UR - http://www.scopus.com/inward/citedby.url?scp=0035521984&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0035521984
VL - 16
SP - 3293
EP - 3303
JO - Journal of Materials Research
JF - Journal of Materials Research
SN - 0884-2914
IS - 11
ER -