Mechanical, corrosion and biological properties of room-temperature sputtered aluminum nitride films with dissimilar nanostructure

Cristina Besleaga, Viorel Dumitru, Liliana Marinela Trinca, Adrian Claudiu Popa, Constantin Catalin Negrila, Łukasz Kołodziejczyk, Catalin Romeo Luculescu, Gabriela Cristina Ionescu, Razvan George Ripeanu, Alina Vladescu, George E. Stan

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


Aluminum Nitride (AlN) has been long time being regarded as highly interesting material for developing sensing applications (including biosensors and implantable sensors). AlN, due to its appealing electronic properties, is envisaged lately to serve as a multi-functional biosensing platform. Although generally exploited for its intrinsic piezoelectricity, its surface morphology and mechanical performance (elastic modulus, hardness, wear, scratch and tensile resistance to delamination, adherence to the substrate), corrosion resistance and cytocompatibility are also essential features for high performance sustainable biosensor devices. However, information about AlN suitability for such applications is rather scarce or at best scattered and incomplete. Here, we aim to deliver a comprehensive evaluation of the morpho-structural, compositional, mechanical, electrochemical and biological properties of reactive radio-frequency magnetron sputtered AlN nanostructured thin films with various degrees of c-axis texturing, deposited at a low temperature (~50 °C) on Si (100) substrates. The inter-conditionality elicited between the base pressure level attained in the reactor chamber and crystalline quality of AlN films is highlighted. The potential suitability of nanostructured AlN (in form of thin films) for the realization of various type of sensors (with emphasis on bio-sensors) is thoroughly probed, thus unveiling its advantages and limitations, as well as suggesting paths to safely exploit the remarkable prospects of this type of materials.

Original languageEnglish
Article number394
Issue number11
Publication statusPublished - 17 Nov 2017
Externally publishedYes


  • Aluminum nitride
  • Biocompatibility
  • Corrosion
  • Magnetron sputtering
  • Nano-mechanical tests
  • Structure

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)

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