Mechanical and tribological properties of sputtered Mo-O-N coatings

J. Musil, P. Novák, M. Hromádka, R. Čerstvý, Z. Soukup, J. Savková

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The article reports on mechanical and tribological properties of Mo-O-N coatings prepared by reactive magnetron sputtering using a continuous and pulsed inlet of oxygen and nitrogen. Main attention was devoted to a detailed investigation of correlations between the coating structure and its mechanical and tribological properties. The structure of coatings was characterized using X-ray diffraction (XRD), the hardness H, the effective Young's modulus E* and the elastic recovery We were measured by a microhardness tester, and the coefficient of friction μ and the coefficient of wear k were determined using a pin-on-disk tribometer. It was found that (1) μ of the Mo-O-N coating correlates quite well with their hardness H and effective Young's modulus E* and depends on its structure, (2) k of the Mo-O-N coatings is almost independent on the value of E* and its value is very low of about ~0.15×10-6mm3/Nm, (3) the incorporation of oxygen in the Mo-N coating increases its coefficient of friction μ at room temperature (RT), and (4) the coefficient of friction μ of both Mo-N and Mo-O-N coatings at first increases with increasing temperature and above ~350°C decreases to the value of μ of the as-deposited coating (μ≈0.4 and 0.5 for the Mo-N and Mo-O-N coatings, respectively).

Original languageEnglish
Pages (from-to)386-392
Number of pages7
JournalSurface and Coatings Technology
Volume215
DOIs
Publication statusPublished - 25 Jan 2013

Fingerprint

mechanical properties
coatings
Coatings
coefficient of friction
Friction
modulus of elasticity
hardness
Elastic moduli
Hardness
Oxygen
tribometers
Reactive sputtering
oxygen
test equipment
Magnetron sputtering
Microhardness
microhardness
magnetron sputtering
Nitrogen
recovery

Keywords

  • Friction
  • Magnetron sputtering
  • Mechanical properties
  • Mo-O-N coatings
  • Structure
  • Wear

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Mechanical and tribological properties of sputtered Mo-O-N coatings. / Musil, J.; Novák, P.; Hromádka, M.; Čerstvý, R.; Soukup, Z.; Savková, J.

In: Surface and Coatings Technology, Vol. 215, 25.01.2013, p. 386-392.

Research output: Contribution to journalArticle

Musil, J. ; Novák, P. ; Hromádka, M. ; Čerstvý, R. ; Soukup, Z. ; Savková, J. / Mechanical and tribological properties of sputtered Mo-O-N coatings. In: Surface and Coatings Technology. 2013 ; Vol. 215. pp. 386-392.
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