Mechanical and tribological properties of sputtered Mo-O-N coatings

J. Musil, P. Novák, M. Hromádka, R. Čerstvý, Z. Soukup, J. Savková

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


The article reports on mechanical and tribological properties of Mo-O-N coatings prepared by reactive magnetron sputtering using a continuous and pulsed inlet of oxygen and nitrogen. Main attention was devoted to a detailed investigation of correlations between the coating structure and its mechanical and tribological properties. The structure of coatings was characterized using X-ray diffraction (XRD), the hardness H, the effective Young's modulus E* and the elastic recovery We were measured by a microhardness tester, and the coefficient of friction μ and the coefficient of wear k were determined using a pin-on-disk tribometer. It was found that (1) μ of the Mo-O-N coating correlates quite well with their hardness H and effective Young's modulus E* and depends on its structure, (2) k of the Mo-O-N coatings is almost independent on the value of E* and its value is very low of about ~0.15×10-6mm3/Nm, (3) the incorporation of oxygen in the Mo-N coating increases its coefficient of friction μ at room temperature (RT), and (4) the coefficient of friction μ of both Mo-N and Mo-O-N coatings at first increases with increasing temperature and above ~350°C decreases to the value of μ of the as-deposited coating (μ≈0.4 and 0.5 for the Mo-N and Mo-O-N coatings, respectively).

Original languageEnglish
Pages (from-to)386-392
Number of pages7
JournalSurface and Coatings Technology
Publication statusPublished - 25 Jan 2013


  • Friction
  • Magnetron sputtering
  • Mechanical properties
  • Mo-O-N coatings
  • Structure
  • Wear

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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