Measurement of hardness of superhard films by microindentation

J. Musil, H. Zeman, F. Kunc, J. Vlček

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)


A critical analysis is presented of the measurement by microindentation of the hardness of superhard films with hardness, H, exceeding 50 GPa. This analysis shows that a very high hardness of the Ti-Si-N nanocomposite film reaching a value of 105 GPa, which was recently reported, is hardly a correct value and so till now, very probably, no material harder than diamond has been prepared.

Original languageEnglish
Pages (from-to)281-285
Number of pages5
JournalMaterials Science and Engineering A
Issue number1-2
Publication statusPublished - 15 Jan 2003


  • Hardness
  • Measurement by microindentation
  • Superhard films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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