Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows

Abstract

Results are presented for some processes occurring at different stages of strong adhesion of coatings and modified layers creation with the use of high-dose implantation and deep diffusive doping of elements under pulsed energetic impact. The investigations have been carried out to consider the possibility of combined materials treatment with pulsed ion beams of power density ranging from 10³ to 10⁸ W/cm². The facility includes the accelerator of high-power ion beams and the sources of repetitively-pulsed metal ion beams and metal plasma flows.

Original language	English
Title of host publication	5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	363-366
Number of pages	4
Volume	1
ISBN (Print)	0780370082, 9780780370081
DOIs	https://doi.org/10.1109/KORUS.2001.975152
Publication status	Published - 2001
Event	5th Korea-Russia International Symposium on Science and Technology, KORUS 2001 - Tomsk, Russian Federation Duration: 26 Jun 2001 → 3 Jul 2001

Other

Other	5th Korea-Russia International Symposium on Science and Technology, KORUS 2001
Country	Russian Federation
City	Tomsk
Period	26.6.01 → 3.7.01

Keywords

combined treatment
high power ion beam
ion mixing
mass transfer
surface layers

ASJC Scopus subject areas

Clinical Biochemistry
Computer Networks and Communications
Biotechnology
Civil and Structural Engineering
Mechanics of Materials
Electronic, Optical and Magnetic Materials
Materials Chemistry
Surfaces, Coatings and Films

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10.1109/KORUS.2001.975152

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Petrov, A. V., Ryabchikov, A. I., Stepanov, I. B., Struts, V. K., Tolmacheva, V. G., Usov, Y. P., & Shulepov, I. A. (2001). Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows. In 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001 (Vol. 1, pp. 363-366). [975152] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/KORUS.2001.975152

Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows. / Petrov, A. V.; Ryabchikov, A. I.; Stepanov, I. B.; Struts, V. K.; Tolmacheva, V. G.; Usov, Yu P.; Shulepov, Ivan Anisimovich.

5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. p. 363-366 975152.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Petrov, AV, Ryabchikov, AI , Stepanov, IB, Struts, VK, Tolmacheva, VG, Usov, YP & Shulepov, IA 2001, Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows. in 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. vol. 1, 975152, Institute of Electrical and Electronics Engineers Inc., pp. 363-366, 5th Korea-Russia International Symposium on Science and Technology, KORUS 2001, Tomsk, Russian Federation, 26.6.01. https://doi.org/10.1109/KORUS.2001.975152

Petrov AV, Ryabchikov AI , Stepanov IB, Struts VK, Tolmacheva VG, Usov YP et al. Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows. In 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2001. p. 363-366. 975152 https://doi.org/10.1109/KORUS.2001.975152

Petrov, A. V. ; Ryabchikov, A. I. ; Stepanov, I. B. ; Struts, V. K. ; Tolmacheva, V. G. ; Usov, Yu P. ; Shulepov, Ivan Anisimovich. / Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows. 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. pp. 363-366

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AB - Results are presented for some processes occurring at different stages of strong adhesion of coatings and modified layers creation with the use of high-dose implantation and deep diffusive doping of elements under pulsed energetic impact. The investigations have been carried out to consider the possibility of combined materials treatment with pulsed ion beams of power density ranging from 103 to 108 W/cm2. The facility includes the accelerator of high-power ion beams and the sources of repetitively-pulsed metal ion beams and metal plasma flows.

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KW - ion mixing

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