Manufacturing of regular microstructures by methods of LIGA - Technologies

M. N. Aumalikova, N. A. Timchenko, S. I. Kuznetsov, B. G. Goldenberg, V. F. Pindurin, S. V. Litvin, V. G. Kanaev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

Original languageEnglish
Title of host publicationProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOIs
Publication statusPublished - 2012
Event2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation
Duration: 18 Sep 201221 Sep 2012

Other

Other2012 7th International Forum on Strategic Technology, IFOST 2012
CountryRussian Federation
CityTomsk
Period18.9.1221.9.12

Fingerprint

Synchrotron radiation
Microstructure
Lithography
Membranes
X rays
Radiation
Manufacturing
Template
Membrane

Keywords

  • deep x-ray lithography
  • LIGA-technology
  • regular microstructures

ASJC Scopus subject areas

  • Management of Technology and Innovation

Cite this

Aumalikova, M. N., Timchenko, N. A., Kuznetsov, S. I., Goldenberg, B. G., Pindurin, V. F., Litvin, S. V., & Kanaev, V. G. (2012). Manufacturing of regular microstructures by methods of LIGA - Technologies. In Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 [6357553] https://doi.org/10.1109/IFOST.2012.6357553

Manufacturing of regular microstructures by methods of LIGA - Technologies. / Aumalikova, M. N.; Timchenko, N. A.; Kuznetsov, S. I.; Goldenberg, B. G.; Pindurin, V. F.; Litvin, S. V.; Kanaev, V. G.

Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357553.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aumalikova, MN, Timchenko, NA, Kuznetsov, SI, Goldenberg, BG, Pindurin, VF, Litvin, SV & Kanaev, VG 2012, Manufacturing of regular microstructures by methods of LIGA - Technologies. in Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012., 6357553, 2012 7th International Forum on Strategic Technology, IFOST 2012, Tomsk, Russian Federation, 18.9.12. https://doi.org/10.1109/IFOST.2012.6357553
Aumalikova MN, Timchenko NA, Kuznetsov SI, Goldenberg BG, Pindurin VF, Litvin SV et al. Manufacturing of regular microstructures by methods of LIGA - Technologies. In Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357553 https://doi.org/10.1109/IFOST.2012.6357553
Aumalikova, M. N. ; Timchenko, N. A. ; Kuznetsov, S. I. ; Goldenberg, B. G. ; Pindurin, V. F. ; Litvin, S. V. ; Kanaev, V. G. / Manufacturing of regular microstructures by methods of LIGA - Technologies. Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012.
@inproceedings{9d80f92135f343d783cfe8054ba3cfb2,
title = "Manufacturing of regular microstructures by methods of LIGA - Technologies",
abstract = "The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.",
keywords = "deep x-ray lithography, LIGA-technology, regular microstructures",
author = "Aumalikova, {M. N.} and Timchenko, {N. A.} and Kuznetsov, {S. I.} and Goldenberg, {B. G.} and Pindurin, {V. F.} and Litvin, {S. V.} and Kanaev, {V. G.}",
year = "2012",
doi = "10.1109/IFOST.2012.6357553",
language = "English",
isbn = "9781467317702",
booktitle = "Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012",

}

TY - GEN

T1 - Manufacturing of regular microstructures by methods of LIGA - Technologies

AU - Aumalikova, M. N.

AU - Timchenko, N. A.

AU - Kuznetsov, S. I.

AU - Goldenberg, B. G.

AU - Pindurin, V. F.

AU - Litvin, S. V.

AU - Kanaev, V. G.

PY - 2012

Y1 - 2012

N2 - The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

AB - The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

KW - deep x-ray lithography

KW - LIGA-technology

KW - regular microstructures

UR - http://www.scopus.com/inward/record.url?scp=84871840934&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871840934&partnerID=8YFLogxK

U2 - 10.1109/IFOST.2012.6357553

DO - 10.1109/IFOST.2012.6357553

M3 - Conference contribution

SN - 9781467317702

BT - Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012

ER -