Abstract
The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.
Original language | English |
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Title of host publication | Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 |
DOIs | |
Publication status | Published - 2012 |
Event | 2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation Duration: 18 Sep 2012 → 21 Sep 2012 |
Other
Other | 2012 7th International Forum on Strategic Technology, IFOST 2012 |
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Country | Russian Federation |
City | Tomsk |
Period | 18.9.12 → 21.9.12 |
Keywords
- deep x-ray lithography
- LIGA-technology
- regular microstructures
ASJC Scopus subject areas
- Management of Technology and Innovation