Manufacturing of regular microstructures by methods of LIGA - Technologies — National Research Tomsk Polytechnic University

Abstract

The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

Original language	English
Title of host publication	Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOIs	https://doi.org/10.1109/IFOST.2012.6357553
Publication status	Published - 2012
Event	2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation Duration: 18 Sep 2012 → 21 Sep 2012

Other

Other	2012 7th International Forum on Strategic Technology, IFOST 2012
Country	Russian Federation
City	Tomsk
Period	18.9.12 → 21.9.12

Keywords

deep x-ray lithography
LIGA-technology
regular microstructures

ASJC Scopus subject areas

Management of Technology and Innovation

Access to Document

10.1109/IFOST.2012.6357553

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Aumalikova, M. N., Timchenko, N. A., Kuznetsov, S. I., Goldenberg, B. G., Pindurin, V. F., Litvin, S. V., & Kanaev, V. G. (2012). Manufacturing of regular microstructures by methods of LIGA - Technologies. In Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 [6357553] https://doi.org/10.1109/IFOST.2012.6357553

Manufacturing of regular microstructures by methods of LIGA - Technologies. / Aumalikova, M. N.; Timchenko, N. A.; Kuznetsov, S. I.; Goldenberg, B. G.; Pindurin, V. F.; Litvin, S. V.; Kanaev, V. G.

Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357553.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Aumalikova, MN, Timchenko, NA , Kuznetsov, SI, Goldenberg, BG, Pindurin, VF, Litvin, SV & Kanaev, VG 2012, Manufacturing of regular microstructures by methods of LIGA - Technologies. in Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012., 6357553, 2012 7th International Forum on Strategic Technology, IFOST 2012, Tomsk, Russian Federation, 18.9.12. https://doi.org/10.1109/IFOST.2012.6357553

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abstract = "The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.",

keywords = "deep x-ray lithography, LIGA-technology, regular microstructures",

author = "Aumalikova, {M. N.} and Timchenko, {N. A.} and Kuznetsov, {S. I.} and Goldenberg, {B. G.} and Pindurin, {V. F.} and Litvin, {S. V.} and Kanaev, {V. G.}",

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AU - Litvin, S. V.

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