Manufacturing of regular microstructures by methods of LIGA - Technologies

M. N. Aumalikova, N. A. Timchenko, S. I. Kuznetsov, B. G. Goldenberg, V. F. Pindurin, S. V. Litvin, V. G. Kanaev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

Original languageEnglish
Title of host publicationProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOIs
Publication statusPublished - 2012
Event2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation
Duration: 18 Sep 201221 Sep 2012

Other

Other2012 7th International Forum on Strategic Technology, IFOST 2012
CountryRussian Federation
CityTomsk
Period18.9.1221.9.12

Keywords

  • deep x-ray lithography
  • LIGA-technology
  • regular microstructures

ASJC Scopus subject areas

  • Management of Technology and Innovation

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    Aumalikova, M. N., Timchenko, N. A., Kuznetsov, S. I., Goldenberg, B. G., Pindurin, V. F., Litvin, S. V., & Kanaev, V. G. (2012). Manufacturing of regular microstructures by methods of LIGA - Technologies. In Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 [6357553] https://doi.org/10.1109/IFOST.2012.6357553