Magnetron sputtered Cr-Ni-N and Ti-Mo-N films

Comparison of mechanical properties

F. Regent, J. Musil

Research output: Contribution to journalArticle

63 Citations (Scopus)

Abstract

This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (< 10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planar Cr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, H, reduced Young's modulus, E* = E/(1 - ν2), and elastic recovery, We, evaluated from loading/unloading curves measured using a computer-controlled microhardness tester Fisherscope H 100, are given; here E and ν are the Young's modulus and Poisson ratio, respectively. The production of a high-temperature (β-Ti,Mo)(110) phase in pure Ti-Mo alloy film sputtered on unheated steel substrate is also reported.

Original languageEnglish
Pages (from-to)146-151
Number of pages6
JournalSurface and Coatings Technology
Volume142-144
DOIs
Publication statusPublished - 1 Jul 2001

Fingerprint

mechanical properties
Mechanical properties
Microhardness
microhardness
modulus of elasticity
Elastic moduli
Steel
unloading
Reactive sputtering
high resistance
Poisson ratio
Unloading
test equipment
plastic deformation
Plastic deformation
Cathodes
cathodes
sputtering
recovery
steels

Keywords

  • Cr-Ni-N and Ti-Mo-N films
  • High-temperature phase
  • Magnetron sputtering
  • Mechanical porperties
  • Structure

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Magnetron sputtered Cr-Ni-N and Ti-Mo-N films : Comparison of mechanical properties. / Regent, F.; Musil, J.

In: Surface and Coatings Technology, Vol. 142-144, 01.07.2001, p. 146-151.

Research output: Contribution to journalArticle

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