Abstract
This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (< 10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planar Cr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, H, reduced Young's modulus, E* = E/(1 - ν2), and elastic recovery, We, evaluated from loading/unloading curves measured using a computer-controlled microhardness tester Fisherscope H 100, are given; here E and ν are the Young's modulus and Poisson ratio, respectively. The production of a high-temperature (β-Ti,Mo)(110) phase in pure Ti-Mo alloy film sputtered on unheated steel substrate is also reported.
| Original language | English |
|---|---|
| Pages (from-to) | 146-151 |
| Number of pages | 6 |
| Journal | Surface and Coatings Technology |
| Volume | 142-144 |
| DOIs | |
| Publication status | Published - 1 Jul 2001 |
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Keywords
- Cr-Ni-N and Ti-Mo-N films
- High-temperature phase
- Magnetron sputtering
- Mechanical porperties
- Structure
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
Magnetron sputtered Cr-Ni-N and Ti-Mo-N films : Comparison of mechanical properties. / Regent, F.; Musil, J.
In: Surface and Coatings Technology, Vol. 142-144, 01.07.2001, p. 146-151.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Magnetron sputtered Cr-Ni-N and Ti-Mo-N films
T2 - Comparison of mechanical properties
AU - Regent, F.
AU - Musil, J.
PY - 2001/7/1
Y1 - 2001/7/1
N2 - This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (< 10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planar Cr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, H, reduced Young's modulus, E* = E/(1 - ν2), and elastic recovery, We, evaluated from loading/unloading curves measured using a computer-controlled microhardness tester Fisherscope H 100, are given; here E and ν are the Young's modulus and Poisson ratio, respectively. The production of a high-temperature (β-Ti,Mo)(110) phase in pure Ti-Mo alloy film sputtered on unheated steel substrate is also reported.
AB - This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (< 10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planar Cr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, H, reduced Young's modulus, E* = E/(1 - ν2), and elastic recovery, We, evaluated from loading/unloading curves measured using a computer-controlled microhardness tester Fisherscope H 100, are given; here E and ν are the Young's modulus and Poisson ratio, respectively. The production of a high-temperature (β-Ti,Mo)(110) phase in pure Ti-Mo alloy film sputtered on unheated steel substrate is also reported.
KW - Cr-Ni-N and Ti-Mo-N films
KW - High-temperature phase
KW - Magnetron sputtering
KW - Mechanical porperties
KW - Structure
UR - http://www.scopus.com/inward/record.url?scp=0035387368&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035387368&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(01)01250-6
DO - 10.1016/S0257-8972(01)01250-6
M3 - Article
AN - SCOPUS:0035387368
VL - 142-144
SP - 146
EP - 151
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -