Magnetron Discharges for Thin Films Plasma Processing

Jindrich Musil, Jaroslav Vlcek, Pavel Baroch

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Materials Surface Processing by Directed Energy Techniques
Publisher	Elsevier Inc.
Pages	67-110
Number of pages	44
ISBN (Print)	9780080444963
DOIs	https://doi.org/10.1016/B978-008044496-3/50004-6
Publication status	Published - 1 Jan 2006

Musil, J., Vlcek, J., & Baroch, P. (2006). Magnetron Discharges for Thin Films Plasma Processing. In Materials Surface Processing by Directed Energy Techniques (pp. 67-110). Elsevier Inc.. https://doi.org/10.1016/B978-008044496-3/50004-6

Materials Surface Processing by Directed Energy Techniques. Elsevier Inc., 2006. p. 67-110.

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Musil, J, Vlcek, J & Baroch, P 2006, Magnetron Discharges for Thin Films Plasma Processing. in Materials Surface Processing by Directed Energy Techniques. Elsevier Inc., pp. 67-110. https://doi.org/10.1016/B978-008044496-3/50004-6

Musil J, Vlcek J, Baroch P. Magnetron Discharges for Thin Films Plasma Processing. In Materials Surface Processing by Directed Energy Techniques. Elsevier Inc. 2006. p. 67-110 https://doi.org/10.1016/B978-008044496-3/50004-6

Musil, Jindrich ; Vlcek, Jaroslav ; Baroch, Pavel. / Magnetron Discharges for Thin Films Plasma Processing. Materials Surface Processing by Directed Energy Techniques. Elsevier Inc., 2006. pp. 67-110

@inbook{ced7f07f976e49de91c2f2cbefc5693f,

title = "Magnetron Discharges for Thin Films Plasma Processing",

author = "Jindrich Musil and Jaroslav Vlcek and Pavel Baroch",

year = "2006",

month = "1",

day = "1",

doi = "10.1016/B978-008044496-3/50004-6",

language = "English",

isbn = "9780080444963",

pages = "67--110",

booktitle = "Materials Surface Processing by Directed Energy Techniques",

publisher = "Elsevier Inc.",

address = "United States",

}

TY - CHAP

T1 - Magnetron Discharges for Thin Films Plasma Processing

AU - Musil, Jindrich

AU - Vlcek, Jaroslav

AU - Baroch, Pavel

PY - 2006/1/1

Y1 - 2006/1/1

UR - http://www.scopus.com/inward/record.url?scp=84903669901&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84903669901&partnerID=8YFLogxK

U2 - 10.1016/B978-008044496-3/50004-6

DO - 10.1016/B978-008044496-3/50004-6

M3 - Chapter

SN - 9780080444963

SP - 67

EP - 110

BT - Materials Surface Processing by Directed Energy Techniques

PB - Elsevier Inc.

ER -