Magnetron Discharges for Thin Films Plasma Processing

Jindrich Musil, Jaroslav Vlcek, Pavel Baroch

Research output: Chapter in Book/Report/Conference proceedingChapter

21 Citations (Scopus)
Original languageEnglish
Title of host publicationMaterials Surface Processing by Directed Energy Techniques
PublisherElsevier Inc.
Pages67-110
Number of pages44
ISBN (Print)9780080444963
DOIs
Publication statusPublished - 1 Jan 2006

ASJC Scopus subject areas

  • Energy(all)

Cite this

Musil, J., Vlcek, J., & Baroch, P. (2006). Magnetron Discharges for Thin Films Plasma Processing. In Materials Surface Processing by Directed Energy Techniques (pp. 67-110). Elsevier Inc.. https://doi.org/10.1016/B978-008044496-3/50004-6

Magnetron Discharges for Thin Films Plasma Processing. / Musil, Jindrich; Vlcek, Jaroslav; Baroch, Pavel.

Materials Surface Processing by Directed Energy Techniques. Elsevier Inc., 2006. p. 67-110.

Research output: Chapter in Book/Report/Conference proceedingChapter

Musil, J, Vlcek, J & Baroch, P 2006, Magnetron Discharges for Thin Films Plasma Processing. in Materials Surface Processing by Directed Energy Techniques. Elsevier Inc., pp. 67-110. https://doi.org/10.1016/B978-008044496-3/50004-6
Musil J, Vlcek J, Baroch P. Magnetron Discharges for Thin Films Plasma Processing. In Materials Surface Processing by Directed Energy Techniques. Elsevier Inc. 2006. p. 67-110 https://doi.org/10.1016/B978-008044496-3/50004-6
Musil, Jindrich ; Vlcek, Jaroslav ; Baroch, Pavel. / Magnetron Discharges for Thin Films Plasma Processing. Materials Surface Processing by Directed Energy Techniques. Elsevier Inc., 2006. pp. 67-110
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