Magnetron Discharges for Thin Films Plasma Processing

Jindrich Musil, Jaroslav Vlcek, Pavel Baroch

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Materials Surface Processing by Directed Energy Techniques
Publisher	Elsevier Inc.
Pages	67-110
Number of pages	44
ISBN (Print)	9780080444963
DOIs	https://doi.org/10.1016/B978-008044496-3/50004-6
Publication status	Published - 1 Jan 2006

Musil, J., Vlcek, J., & Baroch, P. (2006). Magnetron Discharges for Thin Films Plasma Processing. In Materials Surface Processing by Directed Energy Techniques (pp. 67-110). Elsevier Inc.. https://doi.org/10.1016/B978-008044496-3/50004-6

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