Magnetron Discharges for Thin Films Plasma Processing

Jindrich Musil, Jaroslav Vlcek, Pavel Baroch

Research output: Chapter in Book/Report/Conference proceedingChapter

23 Citations (Scopus)
Original languageEnglish
Title of host publicationMaterials Surface Processing by Directed Energy Techniques
PublisherElsevier Inc.
Pages67-110
Number of pages44
ISBN (Print)9780080444963
DOIs
Publication statusPublished - 1 Jan 2006

ASJC Scopus subject areas

  • Energy(all)

Cite this

Musil, J., Vlcek, J., & Baroch, P. (2006). Magnetron Discharges for Thin Films Plasma Processing. In Materials Surface Processing by Directed Energy Techniques (pp. 67-110). Elsevier Inc.. https://doi.org/10.1016/B978-008044496-3/50004-6