Magnetron Discharges for Thin Films Plasma Processing

Jindrich Musil, Jaroslav Vlcek, Pavel Baroch

Research output: Chapter in Book/Report/Conference proceedingChapter

23 Citations (Scopus)
Original languageEnglish
Title of host publicationMaterials Surface Processing by Directed Energy Techniques
PublisherElsevier Inc.
Pages67-110
Number of pages44
ISBN (Print)9780080444963
DOIs
Publication statusPublished - 1 Jan 2006

ASJC Scopus subject areas

  • Energy(all)

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