Magnetron deposited TiO₂ thin films-crystallization and temperature dependence of microstructure and phase composition

R. Kužel, L. Nichtová, Z. Matěj, J. Šícha, J. Musil

Research School of High-Energy Physics

Research output: Contribution to journal › Article

Abstract

Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

Original language	English
Pages (from-to)	287-294
Number of pages	8
Journal	Zeitschrift fur Kristallographie, Supplement
Issue number	27
DOIs	https://doi.org/10.1524/zksu.2008.0035
Publication status	Published - 1 Dec 2008

Fingerprint

Keywords

Crystallization
Nanocrystalline thin films
Powder diffraction
Titanium dioxide

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Inorganic Chemistry

Cite this

Kužel, R., Nichtová, L., Matěj, Z., Šícha, J., & Musil, J. (2008). Magnetron deposited TiO₂ thin films-crystallization and temperature dependence of microstructure and phase composition. Zeitschrift fur Kristallographie, Supplement, (27), 287-294. https://doi.org/10.1524/zksu.2008.0035

@article{fa14cb1b84ae46d7bc4d368ac0966240,

title = "Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition",

abstract = "Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.",

keywords = "Crystallization, Nanocrystalline thin films, Powder diffraction, Titanium dioxide",

author = "R. Kužel and L. Nichtov{\'a} and Z. Matěj and J. Š{\'i}cha and J. Musil",

year = "2008",

month = "12",

day = "1",

doi = "10.1524/zksu.2008.0035",

language = "English",

pages = "287--294",

journal = "Zeitschrift fur Kristallographie, Supplement",

issn = "0930-486X",

publisher = "R. Oldenbourg",

number = "27",

}

TY - JOUR

T1 - Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition

AU - Kužel, R.

AU - Nichtová, L.

AU - Matěj, Z.

AU - Šícha, J.

AU - Musil, J.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

AB - Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

KW - Crystallization

KW - Nanocrystalline thin films

KW - Powder diffraction

KW - Titanium dioxide

UR - http://www.scopus.com/inward/record.url?scp=62749200458&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=62749200458&partnerID=8YFLogxK

U2 - 10.1524/zksu.2008.0035

DO - 10.1524/zksu.2008.0035

M3 - Article

AN - SCOPUS:62749200458

SP - 287

EP - 294

JO - Zeitschrift fur Kristallographie, Supplement

JF - Zeitschrift fur Kristallographie, Supplement

SN - 0930-486X

IS - 27

ER -

Access to Document

10.1524/zksu.2008.0035