Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition

R. Kužel, L. Nichtová, Z. Matěj, J. Šícha, J. Musil

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

Original languageEnglish
Pages (from-to)287-294
Number of pages8
JournalZeitschrift fur Kristallographie, Supplement
Issue number27
DOIs
Publication statusPublished - 1 Dec 2008

Fingerprint

Crystallization
Phase composition
anatase
Titanium dioxide
crystallization
Thin films
rutile
temperature dependence
microstructure
Microstructure
thin films
Amorphous films
Crystallite size
X ray scattering
X ray powder diffraction
Temperature
Diffraction patterns
Optics
x rays
diffraction patterns

Keywords

  • Crystallization
  • Nanocrystalline thin films
  • Powder diffraction
  • Titanium dioxide

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Inorganic Chemistry

Cite this

Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition. / Kužel, R.; Nichtová, L.; Matěj, Z.; Šícha, J.; Musil, J.

In: Zeitschrift fur Kristallographie, Supplement, No. 27, 01.12.2008, p. 287-294.

Research output: Contribution to journalArticle

@article{fa14cb1b84ae46d7bc4d368ac0966240,
title = "Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition",
abstract = "Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.",
keywords = "Crystallization, Nanocrystalline thin films, Powder diffraction, Titanium dioxide",
author = "R. Kužel and L. Nichtov{\'a} and Z. Matěj and J. Š{\'i}cha and J. Musil",
year = "2008",
month = "12",
day = "1",
doi = "10.1524/zksu.2008.0035",
language = "English",
pages = "287--294",
journal = "Zeitschrift fur Kristallographie, Supplement",
issn = "0930-486X",
publisher = "R. Oldenbourg",
number = "27",

}

TY - JOUR

T1 - Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition

AU - Kužel, R.

AU - Nichtová, L.

AU - Matěj, Z.

AU - Šícha, J.

AU - Musil, J.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

AB - Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

KW - Crystallization

KW - Nanocrystalline thin films

KW - Powder diffraction

KW - Titanium dioxide

UR - http://www.scopus.com/inward/record.url?scp=62749200458&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=62749200458&partnerID=8YFLogxK

U2 - 10.1524/zksu.2008.0035

DO - 10.1524/zksu.2008.0035

M3 - Article

SP - 287

EP - 294

JO - Zeitschrift fur Kristallographie, Supplement

JF - Zeitschrift fur Kristallographie, Supplement

SN - 0930-486X

IS - 27

ER -