Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition

R. Kužel, L. Nichtová, Z. Matěj, J. Šícha, J. Musil

Research output: Contribution to journalArticle

9 Citations (Scopus)


Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.

Original languageEnglish
Pages (from-to)287-294
Number of pages8
JournalZeitschrift fur Kristallographie, Supplement
Issue number27
Publication statusPublished - 1 Dec 2008



  • Crystallization
  • Nanocrystalline thin films
  • Powder diffraction
  • Titanium dioxide

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Inorganic Chemistry

Cite this