Abstract
Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.
| Original language | English |
|---|---|
| Pages (from-to) | 287-294 |
| Number of pages | 8 |
| Journal | Zeitschrift fur Kristallographie, Supplement |
| Issue number | 27 |
| DOIs | |
| Publication status | Published - 1 Dec 2008 |
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Keywords
- Crystallization
- Nanocrystalline thin films
- Powder diffraction
- Titanium dioxide
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Inorganic Chemistry
Cite this
Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition. / Kužel, R.; Nichtová, L.; Matěj, Z.; Šícha, J.; Musil, J.
In: Zeitschrift fur Kristallographie, Supplement, No. 27, 01.12.2008, p. 287-294.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Magnetron deposited TiO2 thin films-crystallization and temperature dependence of microstructure and phase composition
AU - Kužel, R.
AU - Nichtová, L.
AU - Matěj, Z.
AU - Šícha, J.
AU - Musil, J.
PY - 2008/12/1
Y1 - 2008/12/1
N2 - Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.
AB - Temperature dependence of microstructure and phase composition of two sets of nanocrystalline Ti02 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 °C significant increase of crystallite size and transformation of anatase into rutile after 700 °C can be observed.
KW - Crystallization
KW - Nanocrystalline thin films
KW - Powder diffraction
KW - Titanium dioxide
UR - http://www.scopus.com/inward/record.url?scp=62749200458&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=62749200458&partnerID=8YFLogxK
U2 - 10.1524/zksu.2008.0035
DO - 10.1524/zksu.2008.0035
M3 - Article
SP - 287
EP - 294
JO - Zeitschrift fur Kristallographie, Supplement
JF - Zeitschrift fur Kristallographie, Supplement
SN - 0930-486X
IS - 27
ER -