Low energy implantation of nitrogen ions by extended beam with a ballistic focusing in a stainless steel

A. I. Ryabchikov, Yu H. Akhmadeev, I. V. Lopatin, O. V. Krysina, D. O. Sivin, O. S. Korneva, P. S. Ananin, S. V. Dektyarev

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Physics & Astronomy