Low energy implantation of nitrogen ions by extended beam with a ballistic focusing in a stainless steel

A. I. Ryabchikov, Yu H. Akhmadeev, I. V. Lopatin, O. V. Krysina, D. O. Sivin, O. S. Korneva, P. S. Ananin, S. V. Dektyarev

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Abstract

The results of experiments on low-energy nitrogen ions implantation in stainless steel AISI 321 are presented. The treatment was carried out with a pulsed beam of nitrogen ions obtained using a ballistic system of ion focusing. The source of ions was nitrogen plasma of a non-independent gas arc discharge with a heated cathode. It was shown that the specimen surface is subjected to ion etching, which leads to the formation of a well, whose profile depends on the ionic exposure parameters. In addition, when treating specimen in such a system, the surface hardness increases up to 4 times. The increase in hardness occurs due to the formation of a modified layer in the surface, with a thickness of up to 50 microns, containing iron and chromium nitrides.

Original languageEnglish
Article number012125
JournalJournal of Physics: Conference Series
Volume1393
Issue number1
DOIs
Publication statusPublished - 28 Nov 2019
Event14th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2019 - Tomsk, Russian Federation
Duration: 15 Sep 201921 Sep 2019

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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