Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes

N. N. Koval, A. I. Ryabchikov, D. O. Sivin, I. V. Lopatin, O. V. Krysina, Yu H. Akhmadeev, D. Yu Ignatov

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

This paper presents the results of low-energy high-current implantation of nitrogen ions into AISI 5140 steel. The plasma was generated using a plasma source based on non-self-sustained arc discharge, using thermionic and hollow cathodes. The influence of the temperature of the specimens and irradiation dose on the characteristics of the ion-modified layer was studied. The temperature of the specimens was controlled within the range of (450–650) °C by changing the duty factor of the bias pulse and the average ion current density. The microhardness of the steel after 1-hour of low-energy high-current implantation of nitrogen ions increased almost 2-fold (up to 7100 MPa), and a modified layer with a thickness up to 200 μm was formed. The wear resistance increased 7.5-fold. The main factor determining the efficiency of nitrogen dopant penetration was the temperature of the specimen. The parameters of the ion treatment influence the shape of the hardness distribution profile and the efficiency of ion cleaning of the surface.

Original languageEnglish
Pages (from-to)152-158
Number of pages7
JournalSurface and Coatings Technology
Volume340
DOIs
Publication statusPublished - 25 Apr 2018

Fingerprint

thermionic cathodes
nitrogen ions
arc discharges
hollow cathodes
Ion implantation
submerging
high current
implantation
Cathodes
Nitrogen
Ions
Plasmas
steels
ions
Steel
wear resistance
microhardness
cleaning
ion currents
temperature

Keywords

  • Elemental composition
  • Hardness
  • Low-energy high-current ion implantation
  • Non-self-sustained arc discharge
  • Plasma immersion nitriding
  • Plasma source
  • Thermionic and hollow cathodes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes. / Koval, N. N.; Ryabchikov, A. I.; Sivin, D. O.; Lopatin, I. V.; Krysina, O. V.; Akhmadeev, Yu H.; Ignatov, D. Yu.

In: Surface and Coatings Technology, Vol. 340, 25.04.2018, p. 152-158.

Research output: Contribution to journalArticle

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AU - Sivin, D. O.

AU - Lopatin, I. V.

AU - Krysina, O. V.

AU - Akhmadeev, Yu H.

AU - Ignatov, D. Yu

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AB - This paper presents the results of low-energy high-current implantation of nitrogen ions into AISI 5140 steel. The plasma was generated using a plasma source based on non-self-sustained arc discharge, using thermionic and hollow cathodes. The influence of the temperature of the specimens and irradiation dose on the characteristics of the ion-modified layer was studied. The temperature of the specimens was controlled within the range of (450–650) °C by changing the duty factor of the bias pulse and the average ion current density. The microhardness of the steel after 1-hour of low-energy high-current implantation of nitrogen ions increased almost 2-fold (up to 7100 MPa), and a modified layer with a thickness up to 200 μm was formed. The wear resistance increased 7.5-fold. The main factor determining the efficiency of nitrogen dopant penetration was the temperature of the specimen. The parameters of the ion treatment influence the shape of the hardness distribution profile and the efficiency of ion cleaning of the surface.

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