Abstract
The fine structure of X-ray absorption spectra near the K edge and the extended fine structure of X-ray absorption for titanium, copper, and chromium in nanocrystalline coatings based on titanium nitride doped with copper, chromium, and silicon are experimentally studied. The samples are prepared by the evaporation of composite cathodes using the vacuum arc plasma-assisted method. The parameters of the local environment of titanium, copper, and chromium atoms in the structures of the samples under study are calculated. It is established that the presence of a copper impurity in the coating of no more than 12% in amount leads to a slight increase in the Ti–N distance in comparison with the titanium sample, whereas doping with silicon leads, on the contrary, to a decrease in the bond length. The measurement results for the K absorption edges of copper and chromium confirm that the doping elements are concentrated at the edges of the growing titanium-nitride crystallite and determine its size, which corresponds to the sizes of the coherent-scattering region of 40–50 nm.
| Original language | English |
|---|---|
| Pages (from-to) | 425-428 |
| Number of pages | 4 |
| Journal | Journal of Surface Investigation |
| Volume | 10 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1 Mar 2016 |
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Keywords
- EXAFS spectroscopy
- local structure
- titanium nitride
- XANES spectroscopy
ASJC Scopus subject areas
- Surfaces, Coatings and Films
Cite this
Local structure of titanium nitride-based coatings. / Timchenko, N. A.; Zubavichus, Ya V.; Krysina, O. V.; Kuznetsov, S. I.; Syrtanov, Maxim Sergeevich; Bondarenko, S. V.
In: Journal of Surface Investigation, Vol. 10, No. 2, 01.03.2016, p. 425-428.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Local structure of titanium nitride-based coatings
AU - Timchenko, N. A.
AU - Zubavichus, Ya V.
AU - Krysina, O. V.
AU - Kuznetsov, S. I.
AU - Syrtanov, Maxim Sergeevich
AU - Bondarenko, S. V.
PY - 2016/3/1
Y1 - 2016/3/1
N2 - The fine structure of X-ray absorption spectra near the K edge and the extended fine structure of X-ray absorption for titanium, copper, and chromium in nanocrystalline coatings based on titanium nitride doped with copper, chromium, and silicon are experimentally studied. The samples are prepared by the evaporation of composite cathodes using the vacuum arc plasma-assisted method. The parameters of the local environment of titanium, copper, and chromium atoms in the structures of the samples under study are calculated. It is established that the presence of a copper impurity in the coating of no more than 12% in amount leads to a slight increase in the Ti–N distance in comparison with the titanium sample, whereas doping with silicon leads, on the contrary, to a decrease in the bond length. The measurement results for the K absorption edges of copper and chromium confirm that the doping elements are concentrated at the edges of the growing titanium-nitride crystallite and determine its size, which corresponds to the sizes of the coherent-scattering region of 40–50 nm.
AB - The fine structure of X-ray absorption spectra near the K edge and the extended fine structure of X-ray absorption for titanium, copper, and chromium in nanocrystalline coatings based on titanium nitride doped with copper, chromium, and silicon are experimentally studied. The samples are prepared by the evaporation of composite cathodes using the vacuum arc plasma-assisted method. The parameters of the local environment of titanium, copper, and chromium atoms in the structures of the samples under study are calculated. It is established that the presence of a copper impurity in the coating of no more than 12% in amount leads to a slight increase in the Ti–N distance in comparison with the titanium sample, whereas doping with silicon leads, on the contrary, to a decrease in the bond length. The measurement results for the K absorption edges of copper and chromium confirm that the doping elements are concentrated at the edges of the growing titanium-nitride crystallite and determine its size, which corresponds to the sizes of the coherent-scattering region of 40–50 nm.
KW - EXAFS spectroscopy
KW - local structure
KW - titanium nitride
KW - XANES spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=84969594433&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84969594433&partnerID=8YFLogxK
U2 - 10.1134/S1027451016020373
DO - 10.1134/S1027451016020373
M3 - Article
AN - SCOPUS:84969594433
VL - 10
SP - 425
EP - 428
JO - Journal of Surface Investigation
JF - Journal of Surface Investigation
SN - 1027-4510
IS - 2
ER -