Laser microdrilling and anodic oxidation of titanium for the manufacturing of a wettability controlled microvalve with UV/DARK actuation

Ali Gökhan Demir, Barbara Previtali, Massimiliano Bestetti

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Capillary pressures due to the wetting behaviour of a liquid on a material can be exploited to control the pressure drop of the liquid into microchannels. The pressure can be estimated by the Young-Laplace equation and for a given liquid, high values can be achieved by having small microchannel diameters and high wetting contact angles. An original actuation method for a microvalve can be derived from this, if reversible wettability behaviour can be achieved, i.e. the switching between hydrophobic to hydrophilic states implies that the microvalve can be turned on and off. In the present work a wettability controlled microvalve with UV/dark actuation is proposed. The valve microchannels are obtained by laser microdrilling on commercially pure titanium foil. Then the drilled titanium foil is anodic oxidized to grow on the microchannel surfaces a nanostructured TiO2 layer, which exhibits reversible wettability behaviour upon the alternate application of UV and darkness. Finally, the concept is demonstrated in a prototype microvalve controlled between OFF and ON states by UV light application.

Original languageEnglish
Title of host publicationASME 2010 10th Biennial Conference on Engineering Systems Design and Analysis, ESDA2010
Pages533-542
Number of pages10
Volume5
DOIs
Publication statusPublished - 2010
Externally publishedYes
EventASME 2010 10th Biennial Conference on Engineering Systems Design and Analysis, ESDA2010 - Istanbul, Turkey
Duration: 12 Jul 201014 Jul 2010

Conference

ConferenceASME 2010 10th Biennial Conference on Engineering Systems Design and Analysis, ESDA2010
CountryTurkey
CityIstanbul
Period12.7.1014.7.10

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Demir, A. G., Previtali, B., & Bestetti, M. (2010). Laser microdrilling and anodic oxidation of titanium for the manufacturing of a wettability controlled microvalve with UV/DARK actuation. In ASME 2010 10th Biennial Conference on Engineering Systems Design and Analysis, ESDA2010 (Vol. 5, pp. 533-542) https://doi.org/10.1115/ESDA2010-24237