Large aperture excimer laser system

V. Losev, J. Liu

Research output: Contribution to journalArticlepeer-review


A 300 J/210 ns XeCl laser system has been developed. Five lasers in MOPA chains characterized by different pumping techniques are described. Also, the main experimental results of the Photons are given.

Original languageEnglish
Article number605304
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2006
Externally publishedYes


  • Excimer laser
  • Laser beam quality

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Large aperture excimer laser system'. Together they form a unique fingerprint.

Cite this