Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)816-821
Number of pages6
JournalInstruments and Experimental Techniques
Volume59
Issue number6
DOIs
Publication statusPublished - 1 Nov 2016

ASJC Scopus subject areas

  • Instrumentation

Cite this

@article{9b11a673da7a423381b674013ee3682b,
title = "Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere",
author = "Evdokimov, {K. E.} and Konishchev, {M. E.} and S. Chzhilei and Pichugin, {V. F.}",
year = "2016",
month = "11",
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doi = "10.1134/S0020441216050055",
language = "English",
volume = "59",
pages = "816--821",
journal = "Instruments and Experimental Techniques",
issn = "0020-4412",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "6",

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AU - Evdokimov, K. E.

AU - Konishchev, M. E.

AU - Chzhilei, S.

AU - Pichugin, V. F.

PY - 2016/11/1

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M3 - Article

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SP - 816

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JO - Instruments and Experimental Techniques

JF - Instruments and Experimental Techniques

SN - 0020-4412

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