Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere

K. E. Evdokimov, M. E. Konishchev, S. Chzhilei, V. F. Pichugin

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)816-821
Number of pages6
JournalInstruments and Experimental Techniques
Issue number6
Publication statusPublished - 1 Nov 2016

ASJC Scopus subject areas

  • Instrumentation

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