Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)816-821
Number of pages6
JournalInstruments and Experimental Techniques
Volume59
Issue number6
DOIs
Publication statusPublished - 1 Nov 2016

ASJC Scopus subject areas

  • Instrumentation

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