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Dive into the research topics of 'Irradiation of sputtered Al-Si-N coatings by pulsed 200 keV C<sup>+</sup> ion beam'. Together they form a unique fingerprint.
Chemical Compounds
Ion beams
Irradiation
Coatings
Ions
Reactive sputtering
Defect density
Magnetron sputtering
Dosimetry
Silicon
Steel
Current density
Substrates
Defects
Engineering & Materials Science
Ion beams
Irradiation
Coatings
Ions
Reactive sputtering
Defect density
Magnetron sputtering
Dosimetry
Current density
Silicon
Substrates
Defects
Steel
Physics & Astronomy
ion beams
coatings
irradiation
defects
ion currents
transmittance
magnetron sputtering
pulse duration
steels
current density
dosage
radiation
silicon
pulses
ions