Abstract
The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.
| Original language | English |
|---|---|
| Pages (from-to) | 995-1004 |
| Number of pages | 10 |
| Journal | Journal of Surface Investigation |
| Volume | 9 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1 Sep 2015 |
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Keywords
- amorphous coating
- binding energy
- ion irradiation
- nanocomposite
ASJC Scopus subject areas
- Surfaces, Coatings and Films
Cite this
Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering. / Uglov, V. V.; Abadias, G.; Zlotski, S. V.; Michel, A.; Saladukhin, I. A.; Leshkevich, S. S.; Gaiduk, P. I.; Jasulaitene, V.
In: Journal of Surface Investigation, Vol. 9, No. 5, 01.09.2015, p. 995-1004.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering
AU - Uglov, V. V.
AU - Abadias, G.
AU - Zlotski, S. V.
AU - Michel, A.
AU - Saladukhin, I. A.
AU - Leshkevich, S. S.
AU - Gaiduk, P. I.
AU - Jasulaitene, V.
PY - 2015/9/1
Y1 - 2015/9/1
N2 - The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.
AB - The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.
KW - amorphous coating
KW - binding energy
KW - ion irradiation
KW - nanocomposite
UR - http://www.scopus.com/inward/record.url?scp=84944250017&partnerID=8YFLogxK
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U2 - 10.1134/S1027451015050420
DO - 10.1134/S1027451015050420
M3 - Article
VL - 9
SP - 995
EP - 1004
JO - Journal of Surface Investigation
JF - Journal of Surface Investigation
SN - 1027-4510
IS - 5
ER -