Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering

V. V. Uglov, G. Abadias, S. V. Zlotski, A. Michel, I. A. Saladukhin, S. S. Leshkevich, P. I. Gaiduk, V. Jasulaitene

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The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.

Original languageEnglish
Pages (from-to)995-1004
Number of pages10
JournalJournal of Surface Investigation
Issue number5
Publication statusPublished - 1 Sep 2015



  • amorphous coating
  • binding energy
  • ion irradiation
  • nanocomposite

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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