Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering

V. V. Uglov, G. Abadias, S. V. Zlotski, A. Michel, I. A. Saladukhin, S. S. Leshkevich, P. I. Gaiduk, V. Jasulaitene

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.

Original languageEnglish
Pages (from-to)995-1004
Number of pages10
JournalJournal of Surface Investigation
Volume9
Issue number5
DOIs
Publication statusPublished - 1 Sep 2015

Fingerprint

Phase composition
Magnetron sputtering
Ions
Coatings
Solid solutions
Ion bombardment
Nanocomposites
Xenon
Reactive sputtering
Amorphous films
Ion implantation
Dosimetry
Diffraction

Keywords

  • amorphous coating
  • binding energy
  • ion irradiation
  • nanocomposite

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering. / Uglov, V. V.; Abadias, G.; Zlotski, S. V.; Michel, A.; Saladukhin, I. A.; Leshkevich, S. S.; Gaiduk, P. I.; Jasulaitene, V.

In: Journal of Surface Investigation, Vol. 9, No. 5, 01.09.2015, p. 995-1004.

Research output: Contribution to journalArticle

Uglov, VV, Abadias, G, Zlotski, SV, Michel, A, Saladukhin, IA, Leshkevich, SS, Gaiduk, PI & Jasulaitene, V 2015, 'Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering', Journal of Surface Investigation, vol. 9, no. 5, pp. 995-1004. https://doi.org/10.1134/S1027451015050420
Uglov, V. V. ; Abadias, G. ; Zlotski, S. V. ; Michel, A. ; Saladukhin, I. A. ; Leshkevich, S. S. ; Gaiduk, P. I. ; Jasulaitene, V. / Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering. In: Journal of Surface Investigation. 2015 ; Vol. 9, No. 5. pp. 995-1004.
@article{a7217ee9cf934fd9b8b598a69528cddd,
title = "Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering",
abstract = "The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.",
keywords = "amorphous coating, binding energy, ion irradiation, nanocomposite",
author = "Uglov, {V. V.} and G. Abadias and Zlotski, {S. V.} and A. Michel and Saladukhin, {I. A.} and Leshkevich, {S. S.} and Gaiduk, {P. I.} and V. Jasulaitene",
year = "2015",
month = "9",
day = "1",
doi = "10.1134/S1027451015050420",
language = "English",
volume = "9",
pages = "995--1004",
journal = "Journal of Surface Investigation",
issn = "1027-4510",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "5",

}

TY - JOUR

T1 - Ion-induced changes in the structure and phase composition of nanocrystalline TiZrSiN coatings formed via magnetron sputtering

AU - Uglov, V. V.

AU - Abadias, G.

AU - Zlotski, S. V.

AU - Michel, A.

AU - Saladukhin, I. A.

AU - Leshkevich, S. S.

AU - Gaiduk, P. I.

AU - Jasulaitene, V.

PY - 2015/9/1

Y1 - 2015/9/1

N2 - The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.

AB - The influence of ion irradiation (180-keV Xe2+ and doses of 1 × 1016 and 5 × 1016 cm–2) on the structure and phase composition of thin (300 nm) nanocrystalline (Ti,Zr)1–xSixNy films deposited via reactive magnetron sputtering (Si content x ≤ 0.22) is investigated. It is found that an increase in the Si concentration of the coating stimulates successive structure conversions from nanocrystalline (x < 0.07; grain size is about 18 nm) to nanocomposite (0.07 ≤ x ≤ 0.11; grain size is about 8 nm) and amorphous (x ≥ 0.18) states. The phase composition of the coatings varies from diphase (c-(Ti,Zr)N + a-TiSiNx) to amorphous (a-TiZrSiN). The nanocomposite coating consists of c-(Ti,Zr)N solid-solution grains (their size is ~8 nm) surrounded by an amorphous a-TiSiN matrix. Ion irradiation exerts no influence on the structural-phase state of the nanocrystalline and amorphous films. The diffraction peaks of the (Ti,Zr)N solid solution is revealed to be split because a double-layer structure is formed. This is associated with Xe-ion implantation into the coating. (Ti,Zr)N solid-solution grains are found to crystallize if amorphous coatings (0.18 ≤–≤ 0.22) are irradiated with xenon ions.

KW - amorphous coating

KW - binding energy

KW - ion irradiation

KW - nanocomposite

UR - http://www.scopus.com/inward/record.url?scp=84944250017&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84944250017&partnerID=8YFLogxK

U2 - 10.1134/S1027451015050420

DO - 10.1134/S1027451015050420

M3 - Article

VL - 9

SP - 995

EP - 1004

JO - Journal of Surface Investigation

JF - Journal of Surface Investigation

SN - 1027-4510

IS - 5

ER -