Ion beam and electrical conductivity analysis of nanocrystalline α-BN and α-Al2O3 ceramics implanted with Ti+n ions and annealed

S. M. Duvanov, A. V. Kabyshev, A. P. Kobzev

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    RBS, ERD, resonant elastic Backscattering Spectrometry of 1H+ and 4He+ ions, electrical resistivity analysis were used to study properties of near-surface layers of modified nanocrystalline α-BN and α-Al2O3 ceramics. High-fluence and high-flux pulse implantation of Ti+n ions and post-implantation thermal annealing in vacuum were utilised for modification of the ceramics. As a result of implantation and subsequent annealing, thermally stable (up to 1600 K) low electrical conductive surface coatings were formed. Observed changes in elements depth profiles and in surface electrical resistivity of these coatings as a result of the post-implantation thermal treatment are discussed in connection with temperature evolution of the damage microstructure.

    Original languageEnglish
    Pages (from-to)271-277
    Number of pages7
    JournalMaterials Science Forum
    Volume248-249
    Publication statusPublished - 1997

    Fingerprint

    Ion beams
    implantation
    ion beams
    ceramics
    Ions
    Ion implantation
    conductivity
    electrical resistivity
    Annealing
    Coatings
    ions
    Backscattering
    coatings
    Spectrometry
    annealing
    Heat treatment
    Vacuum
    Fluxes
    backscattering
    surface layers

    Keywords

    • Ceramics
    • Electrical Conductivity Analysis
    • Ion Beam Analysis
    • Pulsed Ion Implantation
    • Thermal Annealing

    ASJC Scopus subject areas

    • Materials Science(all)

    Cite this

    Ion beam and electrical conductivity analysis of nanocrystalline α-BN and α-Al2O3 ceramics implanted with Ti+n ions and annealed. / Duvanov, S. M.; Kabyshev, A. V.; Kobzev, A. P.

    In: Materials Science Forum, Vol. 248-249, 1997, p. 271-277.

    Research output: Contribution to journalArticle

    @article{a67142314aa3489982a1d73fd706ea43,
    title = "Ion beam and electrical conductivity analysis of nanocrystalline α-BN and α-Al2O3 ceramics implanted with Ti+n ions and annealed",
    abstract = "RBS, ERD, resonant elastic Backscattering Spectrometry of 1H+ and 4He+ ions, electrical resistivity analysis were used to study properties of near-surface layers of modified nanocrystalline α-BN and α-Al2O3 ceramics. High-fluence and high-flux pulse implantation of Ti+n ions and post-implantation thermal annealing in vacuum were utilised for modification of the ceramics. As a result of implantation and subsequent annealing, thermally stable (up to 1600 K) low electrical conductive surface coatings were formed. Observed changes in elements depth profiles and in surface electrical resistivity of these coatings as a result of the post-implantation thermal treatment are discussed in connection with temperature evolution of the damage microstructure.",
    keywords = "Ceramics, Electrical Conductivity Analysis, Ion Beam Analysis, Pulsed Ion Implantation, Thermal Annealing",
    author = "Duvanov, {S. M.} and Kabyshev, {A. V.} and Kobzev, {A. P.}",
    year = "1997",
    language = "English",
    volume = "248-249",
    pages = "271--277",
    journal = "Materials Science Forum",
    issn = "0255-5476",
    publisher = "Trans Tech Publications",

    }

    TY - JOUR

    T1 - Ion beam and electrical conductivity analysis of nanocrystalline α-BN and α-Al2O3 ceramics implanted with Ti+n ions and annealed

    AU - Duvanov, S. M.

    AU - Kabyshev, A. V.

    AU - Kobzev, A. P.

    PY - 1997

    Y1 - 1997

    N2 - RBS, ERD, resonant elastic Backscattering Spectrometry of 1H+ and 4He+ ions, electrical resistivity analysis were used to study properties of near-surface layers of modified nanocrystalline α-BN and α-Al2O3 ceramics. High-fluence and high-flux pulse implantation of Ti+n ions and post-implantation thermal annealing in vacuum were utilised for modification of the ceramics. As a result of implantation and subsequent annealing, thermally stable (up to 1600 K) low electrical conductive surface coatings were formed. Observed changes in elements depth profiles and in surface electrical resistivity of these coatings as a result of the post-implantation thermal treatment are discussed in connection with temperature evolution of the damage microstructure.

    AB - RBS, ERD, resonant elastic Backscattering Spectrometry of 1H+ and 4He+ ions, electrical resistivity analysis were used to study properties of near-surface layers of modified nanocrystalline α-BN and α-Al2O3 ceramics. High-fluence and high-flux pulse implantation of Ti+n ions and post-implantation thermal annealing in vacuum were utilised for modification of the ceramics. As a result of implantation and subsequent annealing, thermally stable (up to 1600 K) low electrical conductive surface coatings were formed. Observed changes in elements depth profiles and in surface electrical resistivity of these coatings as a result of the post-implantation thermal treatment are discussed in connection with temperature evolution of the damage microstructure.

    KW - Ceramics

    KW - Electrical Conductivity Analysis

    KW - Ion Beam Analysis

    KW - Pulsed Ion Implantation

    KW - Thermal Annealing

    UR - http://www.scopus.com/inward/record.url?scp=0030721884&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=0030721884&partnerID=8YFLogxK

    M3 - Article

    AN - SCOPUS:0030721884

    VL - 248-249

    SP - 271

    EP - 277

    JO - Materials Science Forum

    JF - Materials Science Forum

    SN - 0255-5476

    ER -