Investigation on damaged planar-oxide of 1200 V SiC power MOSFETs in non-destructive short-circuit operation

F. Boige, F. Richardeau, D. Trémouilles, S. Lefebvre, G. Guibaud

Research output: Contribution to journal › Article

Abstract

The purpose of this paper is to present an extensive study of three 1200 V silicon carbide (SiC) Power MOSFETs in non-destructive, but leading to degradations, short-circuit operation. Unusually, as compared with equivalent device built on silicon, the damage signature is a significant gate current increase but the components are still functional. In order to find the damage location, non-destructive and destructive methods have been carried out. The results converge to a local gate oxide breakdown caused by the important electrical and thermal stress during short-circuit operation leading to different failure mechanisms depending on the device design.

Original language	English
Pages (from-to)	500-506
Number of pages	7
Journal	Microelectronics Reliability
Volume	76-77
DOIs	https://doi.org/10.1016/j.microrel.2017.06.085
Publication status	Published - 1 Sep 2017
Externally published	Yes

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ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Safety, Risk, Reliability and Quality
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Cite this

Boige, F., Richardeau, F., Trémouilles, D., Lefebvre, S., & Guibaud, G. (2017). Investigation on damaged planar-oxide of 1200 V SiC power MOSFETs in non-destructive short-circuit operation. Microelectronics Reliability, 76-77, 500-506. https://doi.org/10.1016/j.microrel.2017.06.085

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AU - Guibaud, G.

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Access to Document

10.1016/j.microrel.2017.06.085