Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

N. N. Nikitenkov, E. S. Kiselyova, Maxim Evgenievich Konishchev, V. S. Sypchenko, Aleksey Nikolaevich Nikitenkov, V. F. Pichugin, Ivan Anisimovich Shulepov, M. Epple

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2 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science