Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.