Abstract
The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.
| Original language | English |
|---|---|
| Pages (from-to) | 1230-1234 |
| Number of pages | 5 |
| Journal | Journal of Surface Investigation |
| Volume | 8 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Jan 2014 |
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ASJC Scopus subject areas
- Surfaces, Coatings and Films
Cite this
Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering. / Nikitenkov, N. N.; Kiselyova, E. S.; Konishchev, Maxim Evgenievich; Sypchenko, V. S.; Nikitenkov, Aleksey Nikolaevich; Pichugin, V. F.; Shulepov, Ivan Anisimovich; Epple, M.
In: Journal of Surface Investigation, Vol. 8, No. 6, 01.01.2014, p. 1230-1234.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering
AU - Nikitenkov, N. N.
AU - Kiselyova, E. S.
AU - Konishchev, Maxim Evgenievich
AU - Sypchenko, V. S.
AU - Nikitenkov, Aleksey Nikolaevich
AU - Pichugin, V. F.
AU - Shulepov, Ivan Anisimovich
AU - Epple, M.
PY - 2014/1/1
Y1 - 2014/1/1
N2 - The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.
AB - The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.
UR - http://www.scopus.com/inward/record.url?scp=84914171158&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84914171158&partnerID=8YFLogxK
U2 - 10.1134/S1027451014060391
DO - 10.1134/S1027451014060391
M3 - Article
VL - 8
SP - 1230
EP - 1234
JO - Journal of Surface Investigation
JF - Journal of Surface Investigation
SN - 1027-4510
IS - 6
ER -