Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

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1 Citation (Scopus)

Abstract

The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.

Original languageEnglish
Pages (from-to)1230-1234
Number of pages5
JournalJournal of Surface Investigation
Volume8
Issue number6
DOIs
Publication statusPublished - 1 Jan 2014

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Reactive sputtering
Titanium
Phase composition
Magnetron sputtering
Coatings
Nitrogen
Secondary ion mass spectrometry
X ray diffraction analysis
Contact angle
Sputtering
Wetting
Raman spectroscopy
Elastic moduli
Gases
Hardness
Oxygen
Scanning electron microscopy
Substrates
Chemical analysis

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

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title = "Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering",
abstract = "The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.",
author = "Nikitenkov, {N. N.} and Kiselyova, {E. S.} and Konishchev, {Maxim Evgenievich} and Sypchenko, {V. S.} and Aleksey Nikolaevich Nikitenkov and Pichugin, {V. F.} and Shulepov, {Ivan Anisimovich} and M. Epple",
year = "2014",
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TY - JOUR

T1 - Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

AU - Nikitenkov, N. N.

AU - Kiselyova, E. S.

AU - Konishchev, Maxim Evgenievich

AU - Sypchenko, V. S.

AU - Nikitenkov, Aleksey Nikolaevich

AU - Pichugin, V. F.

AU - Shulepov, Ivan Anisimovich

AU - Epple, M.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.

AB - The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.

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JF - Journal of Surface Investigation

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