Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings

Irina A. Bozhko, Evgeniya V. Rybalko, Marina V. Fedorischeva, Victor P. Sergeev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (Hμ ? 25?GPa) and the coefficient of elastic recovery (ky = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80%) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.

Original languageEnglish
Title of host publicationAdvanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
PublisherAmerican Institute of Physics Inc.
Volume1683
ISBN (Electronic)9780735413306
DOIs
Publication statusPublished - 27 Oct 2015
EventInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015 - Tomsk, Russian Federation
Duration: 21 Sep 201525 Sep 2015

Conference

ConferenceInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015
CountryRussian Federation
CityTomsk
Period21.9.1525.9.15

Fingerprint

coatings
quartz
glass
craters
microhardness
magnetron sputtering
recovery
high speed
refractivity
coefficients
diffraction
wavelengths
x rays

Keywords

  • crater density
  • magnetron deposition
  • microhardness
  • optical properties
  • protective coating
  • structure-phase state

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Bozhko, I. A., Rybalko, E. V., Fedorischeva, M. V., & Sergeev, V. P. (2015). Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures (Vol. 1683). [020028] American Institute of Physics Inc.. https://doi.org/10.1063/1.4932718

Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. / Bozhko, Irina A.; Rybalko, Evgeniya V.; Fedorischeva, Marina V.; Sergeev, Victor P.

Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Vol. 1683 American Institute of Physics Inc., 2015. 020028.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bozhko, IA, Rybalko, EV, Fedorischeva, MV & Sergeev, VP 2015, Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. in Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. vol. 1683, 020028, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015, Tomsk, Russian Federation, 21.9.15. https://doi.org/10.1063/1.4932718
Bozhko IA, Rybalko EV, Fedorischeva MV, Sergeev VP. Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Vol. 1683. American Institute of Physics Inc. 2015. 020028 https://doi.org/10.1063/1.4932718
Bozhko, Irina A. ; Rybalko, Evgeniya V. ; Fedorischeva, Marina V. ; Sergeev, Victor P. / Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Vol. 1683 American Institute of Physics Inc., 2015.
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abstract = "The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (Hμ ? 25?GPa) and the coefficient of elastic recovery (ky = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80{\%}) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.",
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AB - The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (Hμ ? 25?GPa) and the coefficient of elastic recovery (ky = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80%) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.

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