Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings

Irina A. Bozhko, Evgeniya V. Rybalko, Marina V. Fedorischeva, Victor P. Sergeev

Division for Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (H_μ ? 25?GPa) and the coefficient of elastic recovery (k_y = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80%) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.

Original language	English
Title of host publication	Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
Publisher	American Institute of Physics Inc.
Volume	1683
ISBN (Electronic)	9780735413306
DOIs	https://doi.org/10.1063/1.4932718
Publication status	Published - 27 Oct 2015
Event	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015 - Tomsk, Russian Federation Duration: 21 Sep 2015 → 25 Sep 2015

Conference

Conference	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015
Country	Russian Federation
City	Tomsk
Period	21.9.15 → 25.9.15

Fingerprint

Keywords

crater density
magnetron deposition
microhardness
optical properties
protective coating
structure-phase state

ASJC Scopus subject areas

Physics and Astronomy(all)

Cite this

Bozhko, I. A., Rybalko, E. V., Fedorischeva, M. V., & Sergeev, V. P. (2015). Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures (Vol. 1683). [020028] American Institute of Physics Inc.. https://doi.org/10.1063/1.4932718

Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. / Bozhko, Irina A.; Rybalko, Evgeniya V.; Fedorischeva, Marina V.; Sergeev, Victor P.

Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Vol. 1683 American Institute of Physics Inc., 2015. 020028.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bozhko, IA, Rybalko, EV, Fedorischeva, MV & Sergeev, VP 2015, Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings. in Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. vol. 1683, 020028, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015, Tomsk, Russian Federation, 21.9.15. https://doi.org/10.1063/1.4932718

@inproceedings{7eb5323e85ba4e77bb41a771a5441196,

title = "Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings",

abstract = "The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (Hμ ? 25?GPa) and the coefficient of elastic recovery (ky = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80{\%}) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.",

keywords = "crater density, magnetron deposition, microhardness, optical properties, protective coating, structure-phase state",

author = "Bozhko, {Irina A.} and Rybalko, {Evgeniya V.} and Fedorischeva, {Marina V.} and Sergeev, {Victor P.}",

year = "2015",

month = "10",

day = "27",

doi = "10.1063/1.4932718",

language = "English",

volume = "1683",

booktitle = "Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures",

publisher = "American Institute of Physics Inc.",

note = "International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015 ; Conference date: 21-09-2015 Through 25-09-2015",

}

TY - GEN

T1 - Investigation of the structural-phase state and the impact-protective properties of optically transparent Si-Al-N coatings

AU - Bozhko, Irina A.

AU - Rybalko, Evgeniya V.

AU - Fedorischeva, Marina V.

AU - Sergeev, Victor P.

PY - 2015/10/27

Y1 - 2015/10/27

N2 - The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (Hμ ? 25?GPa) and the coefficient of elastic recovery (ky = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80%) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.

AB - The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2?μm deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20?nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (Hμ ? 25?GPa) and the coefficient of elastic recovery (ky = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80%) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.

KW - crater density

KW - magnetron deposition

KW - microhardness

KW - optical properties

KW - protective coating

KW - structure-phase state

UR - http://www.scopus.com/inward/record.url?scp=84984540750&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84984540750&partnerID=8YFLogxK

U2 - 10.1063/1.4932718

DO - 10.1063/1.4932718

M3 - Conference contribution

AN - SCOPUS:84984540750

VL - 1683

BT - Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures

PB - American Institute of Physics Inc.

T2 - International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2015

Y2 - 21 September 2015 through 25 September 2015

ER -

Access to Document

10.1063/1.4932718