Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings

Abstract

Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.

Original language	English
Title of host publication	Key Engineering Materials
Publisher	Trans Tech Publications Ltd
Pages	262-268
Number of pages	7
Volume	683
ISBN (Print)	9783038357292
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.683.262
Publication status	Published - 2016
Event	12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015 - Tomsk, Russian Federation Duration: 21 Apr 2015 → 24 Apr 2015

Publication series

Name	Key Engineering Materials
Volume	683
ISSN (Print)	10139826

Other

Other	12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015
Country	Russian Federation
City	Tomsk
Period	21.4.15 → 24.4.15

Keywords

Magnetron deposition
Nanocomposite coating
Optical and mechanical properties
Phase composition
Structure
Transparent coatings

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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Bozhko, I. A., Rybalko, E. V., Fedorishcheva, M. V., Vorobiev, Y. A., Magzhanov, R. M., Chernyavsky, A. G., & Sergeev, V. P. (2016). Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings. In Key Engineering Materials (Vol. 683, pp. 262-268). (Key Engineering Materials; Vol. 683). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.683.262

Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings. / Bozhko, Irina A.; Rybalko, Evgeniya V.; Fedorishcheva, Marina Vladimirovna; Vorobiev, Yurii A.; Magzhanov, Rais M.; Chernyavsky, Alexander G.; Sergeev, Victor Petrovich.

Key Engineering Materials. Vol. 683 Trans Tech Publications Ltd, 2016. p. 262-268 (Key Engineering Materials; Vol. 683).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bozhko, IA, Rybalko, EV, Fedorishcheva, MV, Vorobiev, YA, Magzhanov, RM, Chernyavsky, AG & Sergeev, VP 2016, Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings. in Key Engineering Materials. vol. 683, Key Engineering Materials, vol. 683, Trans Tech Publications Ltd, pp. 262-268, 12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015, Tomsk, Russian Federation, 21.4.15. https://doi.org/10.4028/www.scientific.net/KEM.683.262

Bozhko, Irina A. ; Rybalko, Evgeniya V. ; Fedorishcheva, Marina Vladimirovna ; Vorobiev, Yurii A. ; Magzhanov, Rais M. ; Chernyavsky, Alexander G. ; Sergeev, Victor Petrovich. / Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings. Key Engineering Materials. Vol. 683 Trans Tech Publications Ltd, 2016. pp. 262-268 (Key Engineering Materials).

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abstract = "Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.",

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author = "Bozhko, {Irina A.} and Rybalko, {Evgeniya V.} and Fedorishcheva, {Marina Vladimirovna} and Vorobiev, {Yurii A.} and Magzhanov, {Rais M.} and Chernyavsky, {Alexander G.} and Sergeev, {Victor Petrovich}",

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language = "English",

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AU - Bozhko, Irina A.

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AU - Magzhanov, Rais M.

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AU - Sergeev, Victor Petrovich

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KW - Magnetron deposition

KW - Nanocomposite coating

KW - Optical and mechanical properties

KW - Phase composition

KW - Structure

KW - Transparent coatings

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