Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings

Irina A. Bozhko, Evgeniya V. Rybalko, Marina Vladimirovna Fedorishcheva, Yurii A. Vorobiev, Rais M. Magzhanov, Alexander G. Chernyavsky, Victor Petrovich Sergeev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.

Original languageEnglish
Title of host publicationKey Engineering Materials
PublisherTrans Tech Publications Ltd
Pages262-268
Number of pages7
Volume683
ISBN (Print)9783038357292
DOIs
Publication statusPublished - 2016
Event12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015 - Tomsk, Russian Federation
Duration: 21 Apr 201524 Apr 2015

Publication series

NameKey Engineering Materials
Volume683
ISSN (Print)10139826

Other

Other12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015
CountryRussian Federation
CityTomsk
Period21.4.1524.4.15

Keywords

  • Magnetron deposition
  • Nanocomposite coating
  • Optical and mechanical properties
  • Phase composition
  • Structure
  • Transparent coatings

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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