Abstract
Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.
| Original language | English |
|---|---|
| Title of host publication | Key Engineering Materials |
| Publisher | Trans Tech Publications Ltd |
| Pages | 262-268 |
| Number of pages | 7 |
| Volume | 683 |
| ISBN (Print) | 9783038357292 |
| DOIs | |
| Publication status | Published - 2016 |
| Event | 12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015 - Tomsk, Russian Federation Duration: 21 Apr 2015 → 24 Apr 2015 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 683 |
| ISSN (Print) | 10139826 |
Other
| Other | 12th International Conference on Prospects of Fundamental Sciences Development, PFSD 2015 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 21.4.15 → 24.4.15 |
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Keywords
- Magnetron deposition
- Nanocomposite coating
- Optical and mechanical properties
- Phase composition
- Structure
- Transparent coatings
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
Cite this
Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings. / Bozhko, Irina A.; Rybalko, Evgeniya V.; Fedorishcheva, Marina Vladimirovna; Vorobiev, Yurii A.; Magzhanov, Rais M.; Chernyavsky, Alexander G.; Sergeev, Victor Petrovich.
Key Engineering Materials. Vol. 683 Trans Tech Publications Ltd, 2016. p. 262-268 (Key Engineering Materials; Vol. 683).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Investigation of the microstructure and mechanical properties of Si-Al-N transparent coatings
AU - Bozhko, Irina A.
AU - Rybalko, Evgeniya V.
AU - Fedorishcheva, Marina Vladimirovna
AU - Vorobiev, Yurii A.
AU - Magzhanov, Rais M.
AU - Chernyavsky, Alexander G.
AU - Sergeev, Victor Petrovich
PY - 2016
Y1 - 2016
N2 - Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.
AB - Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.
KW - Magnetron deposition
KW - Nanocomposite coating
KW - Optical and mechanical properties
KW - Phase composition
KW - Structure
KW - Transparent coatings
UR - http://www.scopus.com/inward/record.url?scp=84959152234&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84959152234&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.683.262
DO - 10.4028/www.scientific.net/KEM.683.262
M3 - Conference contribution
AN - SCOPUS:84959152234
SN - 9783038357292
VL - 683
T3 - Key Engineering Materials
SP - 262
EP - 268
BT - Key Engineering Materials
PB - Trans Tech Publications Ltd
ER -