Abstract
The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm2.
Original language | English |
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Title of host publication | Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 |
DOIs | |
Publication status | Published - 2012 |
Event | 2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation Duration: 18 Sep 2012 → 21 Sep 2012 |
Other
Other | 2012 7th International Forum on Strategic Technology, IFOST 2012 |
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Country | Russian Federation |
City | Tomsk |
Period | 18.9.12 → 21.9.12 |
Keywords
- high-voltage repetitively pulsed source
- hollow cathode
- nitrogen and argon plasma
ASJC Scopus subject areas
- Management of Technology and Innovation