Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm2.

Original languageEnglish
Title of host publicationProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOIs
Publication statusPublished - 2012
Event2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation
Duration: 18 Sep 201221 Sep 2012

Other

Other2012 7th International Forum on Strategic Technology, IFOST 2012
CountryRussian Federation
CityTomsk
Period18.9.1221.9.12

Fingerprint

Cathodes
Plasmas
Electric potential
Argon
Nitrogen
Plasma
Regularity
Ions

Keywords

  • high-voltage repetitively pulsed source
  • hollow cathode
  • nitrogen and argon plasma

ASJC Scopus subject areas

  • Management of Technology and Innovation

Cite this

Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage. / Ryabchikov, A. I.; Sivin, Denis Olegovich; Anan'in, Peter Semenovich; Dodorin, K. Yu.

Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357764.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ryabchikov, AI, Sivin, DO, Anan'in, PS & Dodorin, KY 2012, Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage. in Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012., 6357764, 2012 7th International Forum on Strategic Technology, IFOST 2012, Tomsk, Russian Federation, 18.9.12. https://doi.org/10.1109/IFOST.2012.6357764
@inproceedings{ddda23fa4d924b9d83b7ec8625cded2a,
title = "Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage",
abstract = "The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm2.",
keywords = "high-voltage repetitively pulsed source, hollow cathode, nitrogen and argon plasma",
author = "Ryabchikov, {A. I.} and Sivin, {Denis Olegovich} and Peter Semenovich Anan'in and Dodorin, {K. Yu}",
year = "2012",
doi = "10.1109/IFOST.2012.6357764",
language = "English",
isbn = "9781467317702",
booktitle = "Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012",

}

TY - GEN

T1 - Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage

AU - Ryabchikov, A. I.

AU - Sivin, Denis Olegovich

AU - Anan'in, Peter Semenovich

AU - Dodorin, K. Yu

PY - 2012

Y1 - 2012

N2 - The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm2.

AB - The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm2.

KW - high-voltage repetitively pulsed source

KW - hollow cathode

KW - nitrogen and argon plasma

UR - http://www.scopus.com/inward/record.url?scp=84871837453&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871837453&partnerID=8YFLogxK

U2 - 10.1109/IFOST.2012.6357764

DO - 10.1109/IFOST.2012.6357764

M3 - Conference contribution

SN - 9781467317702

BT - Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012

ER -