Abstract
Results are presented from experimental studies of a magnetron sputtering system for different configurations of the magnetic field above the cathode surface. The current-voltage characteristics of a magnetron discharge at different working gas pressures (0.08-0.3 Pa) and currents in the unbalancing coil were studied. The production and transport of charge carriers in a magnetron discharge with an unbalanced magnetic field was investigated by means of probe measurements of plasma characteristics and ion energies in the region between the substrate and the magnetic trap at the cathode surface. The radial distributions of the ion current density, plasma potential, and floating potential in the unbalanced operating mode are found to have pronounced extrema at the magnetron axis. It is shown that the plasma density near the substrate can be increased considerably when the axial magnetic field is high enough to efficiently confine plasma electrons and prevent their escape to the chamber wall.
| Original language | English |
|---|---|
| Pages (from-to) | 399-408 |
| Number of pages | 10 |
| Journal | Plasma Physics Reports |
| Volume | 35 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1 May 2009 |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Physics and Astronomy (miscellaneous)
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Investigation of plasma characteristics in an unbalanced magnetron sputtering system. / Solov'ev, A. A.; Sochugov, N. S.; Oskomov, K. V.; Rabotkin, S. V.
In: Plasma Physics Reports, Vol. 35, No. 5, 01.05.2009, p. 399-408.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Investigation of plasma characteristics in an unbalanced magnetron sputtering system
AU - Solov'ev, A. A.
AU - Sochugov, N. S.
AU - Oskomov, K. V.
AU - Rabotkin, S. V.
PY - 2009/5/1
Y1 - 2009/5/1
N2 - Results are presented from experimental studies of a magnetron sputtering system for different configurations of the magnetic field above the cathode surface. The current-voltage characteristics of a magnetron discharge at different working gas pressures (0.08-0.3 Pa) and currents in the unbalancing coil were studied. The production and transport of charge carriers in a magnetron discharge with an unbalanced magnetic field was investigated by means of probe measurements of plasma characteristics and ion energies in the region between the substrate and the magnetic trap at the cathode surface. The radial distributions of the ion current density, plasma potential, and floating potential in the unbalanced operating mode are found to have pronounced extrema at the magnetron axis. It is shown that the plasma density near the substrate can be increased considerably when the axial magnetic field is high enough to efficiently confine plasma electrons and prevent their escape to the chamber wall.
AB - Results are presented from experimental studies of a magnetron sputtering system for different configurations of the magnetic field above the cathode surface. The current-voltage characteristics of a magnetron discharge at different working gas pressures (0.08-0.3 Pa) and currents in the unbalancing coil were studied. The production and transport of charge carriers in a magnetron discharge with an unbalanced magnetic field was investigated by means of probe measurements of plasma characteristics and ion energies in the region between the substrate and the magnetic trap at the cathode surface. The radial distributions of the ion current density, plasma potential, and floating potential in the unbalanced operating mode are found to have pronounced extrema at the magnetron axis. It is shown that the plasma density near the substrate can be increased considerably when the axial magnetic field is high enough to efficiently confine plasma electrons and prevent their escape to the chamber wall.
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U2 - 10.1134/S1063780X09050055
DO - 10.1134/S1063780X09050055
M3 - Article
VL - 35
SP - 399
EP - 408
JO - Plasma Physics Reports
JF - Plasma Physics Reports
SN - 1063-780X
IS - 5
ER -