TY - JOUR
T1 - Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing
AU - Stepanov, Igor B.
AU - Ryabchikov, Alexander I.
AU - Anan'in, Peter Semenovich
AU - Bumagina, Anna I.
AU - Shevelev, Alexey Eduardovich
AU - Shulepov, Ivan A.
AU - Sivin, Denis Olegovich
PY - 2016/6/25
Y1 - 2016/6/25
N2 - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
AB - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
KW - Coating
KW - High-frequency short-pulse negative bias
KW - Ion implantation
KW - Macroparticle
KW - Plasma filter
KW - Vacuum arc plasma
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U2 - 10.1016/j.surfcoat.2016.04.012
DO - 10.1016/j.surfcoat.2016.04.012
M3 - Article
AN - SCOPUS:84962874733
VL - 296
SP - 20
EP - 25
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -