Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

Abstract

The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

Original language	English
Pages (from-to)	20-25
Number of pages	6
Journal	Surface and Coatings Technology
Volume	296
DOIs	https://doi.org/10.1016/j.surfcoat.2016.04.012
Publication status	Published - 25 Jun 2016

Keywords

Coating
High-frequency short-pulse negative bias
Ion implantation
Macroparticle
Plasma filter
Vacuum arc plasma

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Materials Chemistry
Surfaces, Coatings and Films
Surfaces and Interfaces

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10.1016/j.surfcoat.2016.04.012

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Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing. / Stepanov, Igor B.; Ryabchikov, Alexander I.; Anan'in, Peter Semenovich; Bumagina, Anna I.; Shevelev, Alexey Eduardovich; Shulepov, Ivan A.; Sivin, Denis Olegovich.

In: Surface and Coatings Technology, Vol. 296, 25.06.2016, p. 20-25.

Research output: Contribution to journal › Article › peer-review

Stepanov, Igor B. ; Ryabchikov, Alexander I. ; Anan'in, Peter Semenovich ; Bumagina, Anna I. ; Shevelev, Alexey Eduardovich ; Shulepov, Ivan A. ; Sivin, Denis Olegovich. / Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing. In: Surface and Coatings Technology. 2016 ; Vol. 296. pp. 20-25.

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title = "Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing",

abstract = "The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source {"}Rainbow-5{"} and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.",

keywords = "Coating, High-frequency short-pulse negative bias, Ion implantation, Macroparticle, Plasma filter, Vacuum arc plasma",

author = "Stepanov, {Igor B.} and Ryabchikov, {Alexander I.} and Peter Semenovich Anan'in and Bumagina, {Anna I.} and Shevelev, {Alexey Eduardovich} and Shulepov, {Ivan A.} and Sivin, {Denis Olegovich}",

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AU - Stepanov, Igor B.

AU - Ryabchikov, Alexander I.

AU - Anan'in, Peter Semenovich

AU - Bumagina, Anna I.

AU - Shevelev, Alexey Eduardovich

AU - Shulepov, Ivan A.

AU - Sivin, Denis Olegovich

PY - 2016/6/25

Y1 - 2016/6/25

N2 - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

AB - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

KW - Coating

KW - High-frequency short-pulse negative bias

KW - Ion implantation

KW - Macroparticle

KW - Plasma filter

KW - Vacuum arc plasma

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