Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

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Abstract

The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

Original languageEnglish
Pages (from-to)20-25
Number of pages6
JournalSurface and Coatings Technology
Volume296
DOIs
Publication statusPublished - 25 Jun 2016

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Keywords

  • Coating
  • High-frequency short-pulse negative bias
  • Ion implantation
  • Macroparticle
  • Plasma filter
  • Vacuum arc plasma

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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