Abstract
The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
| Original language | English |
|---|---|
| Pages (from-to) | 20-25 |
| Number of pages | 6 |
| Journal | Surface and Coatings Technology |
| Volume | 296 |
| DOIs | |
| Publication status | Published - 25 Jun 2016 |
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Keywords
- Coating
- High-frequency short-pulse negative bias
- Ion implantation
- Macroparticle
- Plasma filter
- Vacuum arc plasma
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Materials Chemistry
- Surfaces, Coatings and Films
- Surfaces and Interfaces
Cite this
Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing. / Stepanov, Igor B.; Ryabchikov, Alexander I.; Anan'in, Peter Semenovich; Bumagina, Anna I.; Shevelev, Alexey Eduardovich; Shulepov, Ivan A.; Sivin, Denis Olegovich.
In: Surface and Coatings Technology, Vol. 296, 25.06.2016, p. 20-25.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing
AU - Stepanov, Igor B.
AU - Ryabchikov, Alexander I.
AU - Anan'in, Peter Semenovich
AU - Bumagina, Anna I.
AU - Shevelev, Alexey Eduardovich
AU - Shulepov, Ivan A.
AU - Sivin, Denis Olegovich
PY - 2016/6/25
Y1 - 2016/6/25
N2 - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
AB - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
KW - Coating
KW - High-frequency short-pulse negative bias
KW - Ion implantation
KW - Macroparticle
KW - Plasma filter
KW - Vacuum arc plasma
UR - http://www.scopus.com/inward/record.url?scp=84962874733&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84962874733&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2016.04.012
DO - 10.1016/j.surfcoat.2016.04.012
M3 - Article
VL - 296
SP - 20
EP - 25
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -