Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

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9 Citations (Scopus)

Abstract

The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

Original languageEnglish
Pages (from-to)20-25
Number of pages6
JournalSurface and Coatings Technology
Volume296
DOIs
Publication statusPublished - 25 Jun 2016

Fingerprint

Plasma applications
plasma jets
Ion beams
ion beams
Vacuum
Plasmas
coatings
Coatings
vacuum
Processing
Metals
submerging
high current
Plasma deposition
Plasma sources
rainbows
Surface morphology
Surface treatment
surface treatment
metals

Keywords

  • Coating
  • High-frequency short-pulse negative bias
  • Ion implantation
  • Macroparticle
  • Plasma filter
  • Vacuum arc plasma

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

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title = "Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing",
abstract = "The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source {"}Rainbow-5{"} and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.",
keywords = "Coating, High-frequency short-pulse negative bias, Ion implantation, Macroparticle, Plasma filter, Vacuum arc plasma",
author = "Stepanov, {Igor B.} and Ryabchikov, {Alexander I.} and Peter Semenovich Anan'in and Bumagina, {Anna I.} and Shevelev, {Alexey Eduardovich} and Shulepov, {Ivan A.} and Sivin, {Denis Olegovich}",
year = "2016",
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journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",

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TY - JOUR

T1 - Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

AU - Stepanov, Igor B.

AU - Ryabchikov, Alexander I.

AU - Anan'in, Peter Semenovich

AU - Bumagina, Anna I.

AU - Shevelev, Alexey Eduardovich

AU - Shulepov, Ivan A.

AU - Sivin, Denis Olegovich

PY - 2016/6/25

Y1 - 2016/6/25

N2 - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

AB - The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source "Rainbow-5" and high-frequency (100 kHz) short-pulsed (8 μs) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.

KW - Coating

KW - High-frequency short-pulse negative bias

KW - Ion implantation

KW - Macroparticle

KW - Plasma filter

KW - Vacuum arc plasma

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U2 - 10.1016/j.surfcoat.2016.04.012

DO - 10.1016/j.surfcoat.2016.04.012

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VL - 296

SP - 20

EP - 25

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

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