Investigation of buried quantum dots using grazing incidence X-ray diffraction

P. Schroth, T. Slobodskyy, D. Grigoriev, A. Minkevich, M. Riotte, S. Lazarev, E. Fohtung, D. Z. Hu, D. M. Schaadt, T. Baumbach

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


Self-organized, buried InAs quantum dots covered by an AlAs diffusion barrier were investigated under UHV conditions using grazing incidence X-ray diffraction. The experimental data is compared to the simulated results obtained by Finite Element Method and Distorted Wave Born Approximation. We have found that the simulated data could be compared to the experimental one only after convolution by the resolution element which can be estimated from the experiment. By adjusting the simulation parameters we were able to find good agreement between the simulated and the measured data.

Original languageEnglish
Pages (from-to)721-724
Number of pages4
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Issue number10
Publication statusPublished - 5 Jun 2012
Externally publishedYes


  • Annealing
  • Grazing incidence X-ray diffraction
  • Molecular beam epitaxy
  • Self-organized quantum dots

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

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