Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering

E. L. Boytsova, L. A. Leonova

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Infrared spectroscopy and atomic emission analysis help establish the corrosion resistance of Ti‒O–N films deposited on steel substrates via reactive magnetron sputtering, along with potential biological activity by detecting nitric oxide in model solutions after contact with Ti–O–N coatings. Differential thermal analysis and scanning electron microscopy allow the thermal stability of the films to be judged at temperatures of up to 1300°C.

Original languageEnglish
Pages (from-to)1143-1147
Number of pages5
JournalBulletin of the Russian Academy of Sciences: Physics
Issue number9
Publication statusPublished - 1 Sep 2018

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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