Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering

E. L. Boytsova, L. A. Leonova

Research output: Contribution to journalArticle

Abstract

Infrared spectroscopy and atomic emission analysis help establish the corrosion resistance of Ti‒O–N films deposited on steel substrates via reactive magnetron sputtering, along with potential biological activity by detecting nitric oxide in model solutions after contact with Ti–O–N coatings. Differential thermal analysis and scanning electron microscopy allow the thermal stability of the films to be judged at temperatures of up to 1300°C.

Original languageEnglish
Pages (from-to)1143-1147
Number of pages5
JournalBulletin of the Russian Academy of Sciences: Physics
Volume82
Issue number9
DOIs
Publication statusPublished - 1 Sep 2018

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magnetron sputtering
nitric oxide
thin films
activity (biology)
corrosion resistance
thermal analysis
thermal stability
infrared spectroscopy
steels
coatings
scanning electron microscopy
temperature

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering. / Boytsova, E. L.; Leonova, L. A.

In: Bulletin of the Russian Academy of Sciences: Physics, Vol. 82, No. 9, 01.09.2018, p. 1143-1147.

Research output: Contribution to journalArticle

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