Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N

Abstract

X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO₂ and the layers on the basis of Si-Al-N contain Si₃N₄ amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.

Original language	English
Title of host publication	AIP Conference Proceedings
Editors	Victor E. Panin, Sergey G. Psakhie, Vasily M. Fomin, Victor E. Panin, Sergey G. Psakhie
Publisher	American Institute of Physics Inc.
Pages	147-150
Number of pages	4
ISBN (Electronic)	9780735412606
DOIs	https://doi.org/10.1063/1.4898904
Publication status	Published - 2014
Event	International Conference on Physical Mesomechanics of Multilevel Systems 2014 - Tomsk, Russian Federation Duration: 3 Sep 2014 → 5 Sep 2014

Publication series

Name	AIP Conference Proceedings
Volume	1623
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	International Conference on Physical Mesomechanics of Multilevel Systems 2014
Country	Russian Federation
City	Tomsk
Period	3.9.14 → 5.9.14

Keywords

Curvature-torsion
Grain size
Internal stresses
Magnetron deposition
Microstructure
Multilayer heat-shielding coatings
Phase composition

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.4898904

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Cite this

Fedorischeva, M. V., Sergeev, V. P., Kalashnikov, M. P., & Voronov, A. V. (2014). Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N. In V. E. Panin, S. G. Psakhie, V. M. Fomin, V. E. Panin, & S. G. Psakhie (Eds.), AIP Conference Proceedings (pp. 147-150). (AIP Conference Proceedings; Vol. 1623). American Institute of Physics Inc.. https://doi.org/10.1063/1.4898904

Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N. / Fedorischeva, Marina V.; Sergeev, Victor P.; Kalashnikov, Mark P.; Voronov, Andrei V.

AIP Conference Proceedings. ed. / Victor E. Panin; Sergey G. Psakhie; Vasily M. Fomin; Victor E. Panin; Sergey G. Psakhie. American Institute of Physics Inc., 2014. p. 147-150 (AIP Conference Proceedings; Vol. 1623).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fedorischeva, MV, Sergeev, VP , Kalashnikov, MP & Voronov, AV 2014, Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N. in VE Panin, SG Psakhie, VM Fomin, VE Panin & SG Psakhie (eds), AIP Conference Proceedings. AIP Conference Proceedings, vol. 1623, American Institute of Physics Inc., pp. 147-150, International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russian Federation, 3.9.14. https://doi.org/10.1063/1.4898904

Fedorischeva, Marina V. ; Sergeev, Victor P. ; Kalashnikov, Mark P. ; Voronov, Andrei V. / Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N. AIP Conference Proceedings. editor / Victor E. Panin ; Sergey G. Psakhie ; Vasily M. Fomin ; Victor E. Panin ; Sergey G. Psakhie. American Institute of Physics Inc., 2014. pp. 147-150 (AIP Conference Proceedings).

@inproceedings{249a61e20aaa4f339f88bac6694144eb,

title = "Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N",

abstract = "X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.",

keywords = "Curvature-torsion, Grain size, Internal stresses, Magnetron deposition, Microstructure, Multilayer heat-shielding coatings, Phase composition",

author = "Fedorischeva, {Marina V.} and Sergeev, {Victor P.} and Kalashnikov, {Mark P.} and Voronov, {Andrei V.}",

year = "2014",

doi = "10.1063/1.4898904",

language = "English",

series = "AIP Conference Proceedings",

publisher = "American Institute of Physics Inc.",

pages = "147--150",

editor = "Panin, {Victor E.} and Psakhie, {Sergey G.} and Fomin, {Vasily M.} and Panin, {Victor E.} and Psakhie, {Sergey G.}",

booktitle = "AIP Conference Proceedings",

note = "International Conference on Physical Mesomechanics of Multilevel Systems 2014 ; Conference date: 03-09-2014 Through 05-09-2014",

}

TY - GEN

T1 - Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N

AU - Fedorischeva, Marina V.

AU - Sergeev, Victor P.

AU - Kalashnikov, Mark P.

AU - Voronov, Andrei V.

PY - 2014

Y1 - 2014

N2 - X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.

AB - X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.

KW - Curvature-torsion

KW - Grain size

KW - Internal stresses

KW - Magnetron deposition

KW - Microstructure

KW - Multilayer heat-shielding coatings

KW - Phase composition

UR - http://www.scopus.com/inward/record.url?scp=84915748343&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84915748343&partnerID=8YFLogxK

U2 - 10.1063/1.4898904

DO - 10.1063/1.4898904

M3 - Conference contribution

AN - SCOPUS:84915748343

T3 - AIP Conference Proceedings

SP - 147

EP - 150

BT - AIP Conference Proceedings

A2 - Panin, Victor E.

A2 - Psakhie, Sergey G.

A2 - Fomin, Vasily M.

A2 - Panin, Victor E.

A2 - Psakhie, Sergey G.

PB - American Institute of Physics Inc.

T2 - International Conference on Physical Mesomechanics of Multilevel Systems 2014

Y2 - 3 September 2014 through 5 September 2014

ER -