Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N

Marina V. Fedorischeva, Victor P. Sergeev, Mark P. Kalashnikov, Andrei V. Voronov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
EditorsVictor E. Panin, Sergey G. Psakhie, Vasily M. Fomin, Victor E. Panin, Sergey G. Psakhie
PublisherAmerican Institute of Physics Inc.
Pages147-150
Number of pages4
ISBN (Electronic)9780735412606
DOIs
Publication statusPublished - 2014
EventInternational Conference on Physical Mesomechanics of Multilevel Systems 2014 - Tomsk, Russian Federation
Duration: 3 Sep 20145 Sep 2014

Publication series

NameAIP Conference Proceedings
Volume1623
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherInternational Conference on Physical Mesomechanics of Multilevel Systems 2014
CountryRussian Federation
CityTomsk
Period3.9.145.9.14

Keywords

  • Curvature-torsion
  • Grain size
  • Internal stresses
  • Magnetron deposition
  • Microstructure
  • Multilayer heat-shielding coatings
  • Phase composition

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Fedorischeva, M. V., Sergeev, V. P., Kalashnikov, M. P., & Voronov, A. V. (2014). Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N. In V. E. Panin, S. G. Psakhie, V. M. Fomin, V. E. Panin, & S. G. Psakhie (Eds.), AIP Conference Proceedings (pp. 147-150). (AIP Conference Proceedings; Vol. 1623). American Institute of Physics Inc.. https://doi.org/10.1063/1.4898904