@inproceedings{249a61e20aaa4f339f88bac6694144eb,
title = "Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N",
abstract = "X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basically nanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that the crystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.",
keywords = "Curvature-torsion, Grain size, Internal stresses, Magnetron deposition, Microstructure, Multilayer heat-shielding coatings, Phase composition",
author = "Fedorischeva, {Marina V.} and Sergeev, {Victor P.} and Kalashnikov, {Mark P.} and Voronov, {Andrei V.}",
year = "2014",
doi = "10.1063/1.4898904",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
pages = "147--150",
editor = "Panin, {Victor E.} and Psakhie, {Sergey G.} and Fomin, {Vasily M.} and Panin, {Victor E.} and Psakhie, {Sergey G.}",
booktitle = "AIP Conference Proceedings",
note = "International Conference on Physical Mesomechanics of Multilevel Systems 2014 ; Conference date: 03-09-2014 Through 05-09-2014",
}