Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition

A. D. Pogrebnjak, R. Krause-Rehberg, A. I. Kupchishin, A. A. Drobyshevskaya, V. I. Ivaschenko, A. P. Shypylenko, D. A. Kolesnikov, N. K. Erdybaeva

Research output: Contribution to journalArticle

Abstract

Original results of investigations of Ti-Si-N nanostructured coatings deposited by cathodic vacuum arc evaporation are presented in this work. Investigations are provided by the supplementing each other methods: slow positron beam, XRD, SEM with EDS, RBS, AFM, as well as measurement of nanohardness and elastic modulus before and after annealing at 600 °C (for 30 min). It was found that after deposition the solid solution (Ti, Si) N is formed in coatings. In this solid solution the stress-strain state (compressive strain - 2,6%) is occurring. As a result of thermal annealing the deformation slightly decreases to - 2,3%. Measurements provided by method of Positron annihilation spectroscopy (PAS) show that at the interfaces of coatings the segregated defects are occurring as a result of thermal diffusion process. These defects form clusters of vacancy-type defects of a high concentration - from 5·1016 cm-3 to 7,5·1017 cm- 3.

Original languageEnglish
Pages (from-to)134-139
Number of pages6
JournalProblems of Atomic Science and Technology
Issue number2
Publication statusPublished - 22 Apr 2013
Externally publishedYes

Fingerprint

Nanostructures
Cathodes
arcs
cathodes
Vacuum
Annealing
coatings
Coatings
Defects
vacuum
annealing
Solid solutions
defects
solid solutions
Positron annihilation spectroscopy
Nanohardness
Thermal diffusion
Positrons
thermal diffusion
positron annihilation

ASJC Scopus subject areas

  • Radiation
  • Nuclear and High Energy Physics
  • Nuclear Energy and Engineering
  • Materials Science(all)

Cite this

Pogrebnjak, A. D., Krause-Rehberg, R., Kupchishin, A. I., Drobyshevskaya, A. A., Ivaschenko, V. I., Shypylenko, A. P., ... Erdybaeva, N. K. (2013). Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition. Problems of Atomic Science and Technology, (2), 134-139.

Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition. / Pogrebnjak, A. D.; Krause-Rehberg, R.; Kupchishin, A. I.; Drobyshevskaya, A. A.; Ivaschenko, V. I.; Shypylenko, A. P.; Kolesnikov, D. A.; Erdybaeva, N. K.

In: Problems of Atomic Science and Technology, No. 2, 22.04.2013, p. 134-139.

Research output: Contribution to journalArticle

Pogrebnjak, AD, Krause-Rehberg, R, Kupchishin, AI, Drobyshevskaya, AA, Ivaschenko, VI, Shypylenko, AP, Kolesnikov, DA & Erdybaeva, NK 2013, 'Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition', Problems of Atomic Science and Technology, no. 2, pp. 134-139.
Pogrebnjak, A. D. ; Krause-Rehberg, R. ; Kupchishin, A. I. ; Drobyshevskaya, A. A. ; Ivaschenko, V. I. ; Shypylenko, A. P. ; Kolesnikov, D. A. ; Erdybaeva, N. K. / Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition. In: Problems of Atomic Science and Technology. 2013 ; No. 2. pp. 134-139.
@article{85c043ec2e604a309f2eb693bd63683f,
title = "Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition",
abstract = "Original results of investigations of Ti-Si-N nanostructured coatings deposited by cathodic vacuum arc evaporation are presented in this work. Investigations are provided by the supplementing each other methods: slow positron beam, XRD, SEM with EDS, RBS, AFM, as well as measurement of nanohardness and elastic modulus before and after annealing at 600 °C (for 30 min). It was found that after deposition the solid solution (Ti, Si) N is formed in coatings. In this solid solution the stress-strain state (compressive strain - 2,6{\%}) is occurring. As a result of thermal annealing the deformation slightly decreases to - 2,3{\%}. Measurements provided by method of Positron annihilation spectroscopy (PAS) show that at the interfaces of coatings the segregated defects are occurring as a result of thermal diffusion process. These defects form clusters of vacancy-type defects of a high concentration - from 5·1016 cm-3 to 7,5·1017 cm- 3.",
author = "Pogrebnjak, {A. D.} and R. Krause-Rehberg and Kupchishin, {A. I.} and Drobyshevskaya, {A. A.} and Ivaschenko, {V. I.} and Shypylenko, {A. P.} and Kolesnikov, {D. A.} and Erdybaeva, {N. K.}",
year = "2013",
month = "4",
day = "22",
language = "English",
pages = "134--139",
journal = "Problems of Atomic Science and Technology",
issn = "1682-9344",
publisher = "National Science Center, Kharkov Institute of Physics and Technology",
number = "2",

}

TY - JOUR

T1 - Influence of thermal annealing on the structure of defects and properties of nanostructures Ti-Si-N coatings obtained by cathode vacuum arc deposition

AU - Pogrebnjak, A. D.

AU - Krause-Rehberg, R.

AU - Kupchishin, A. I.

AU - Drobyshevskaya, A. A.

AU - Ivaschenko, V. I.

AU - Shypylenko, A. P.

AU - Kolesnikov, D. A.

AU - Erdybaeva, N. K.

PY - 2013/4/22

Y1 - 2013/4/22

N2 - Original results of investigations of Ti-Si-N nanostructured coatings deposited by cathodic vacuum arc evaporation are presented in this work. Investigations are provided by the supplementing each other methods: slow positron beam, XRD, SEM with EDS, RBS, AFM, as well as measurement of nanohardness and elastic modulus before and after annealing at 600 °C (for 30 min). It was found that after deposition the solid solution (Ti, Si) N is formed in coatings. In this solid solution the stress-strain state (compressive strain - 2,6%) is occurring. As a result of thermal annealing the deformation slightly decreases to - 2,3%. Measurements provided by method of Positron annihilation spectroscopy (PAS) show that at the interfaces of coatings the segregated defects are occurring as a result of thermal diffusion process. These defects form clusters of vacancy-type defects of a high concentration - from 5·1016 cm-3 to 7,5·1017 cm- 3.

AB - Original results of investigations of Ti-Si-N nanostructured coatings deposited by cathodic vacuum arc evaporation are presented in this work. Investigations are provided by the supplementing each other methods: slow positron beam, XRD, SEM with EDS, RBS, AFM, as well as measurement of nanohardness and elastic modulus before and after annealing at 600 °C (for 30 min). It was found that after deposition the solid solution (Ti, Si) N is formed in coatings. In this solid solution the stress-strain state (compressive strain - 2,6%) is occurring. As a result of thermal annealing the deformation slightly decreases to - 2,3%. Measurements provided by method of Positron annihilation spectroscopy (PAS) show that at the interfaces of coatings the segregated defects are occurring as a result of thermal diffusion process. These defects form clusters of vacancy-type defects of a high concentration - from 5·1016 cm-3 to 7,5·1017 cm- 3.

UR - http://www.scopus.com/inward/record.url?scp=84876239108&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84876239108&partnerID=8YFLogxK

M3 - Article

SP - 134

EP - 139

JO - Problems of Atomic Science and Technology

JF - Problems of Atomic Science and Technology

SN - 1682-9344

IS - 2

ER -