Influence of the substrate bias on the stoichiometry and structure of RF-magnetron sputter-deposited silver-containing calcium phosphate coatings

A. A. Ivanova, M. A. Surmeneva, I. Y. Grubova, A. A. Sharonova, V. F. Pichugin, M. V. Chaikina, V. Buck, O. Prymak, M. Epple, R. A. Surmenev

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

A coating on the basis of silver-containing hydroxyapatite (silver-hydroxyapatite) was deposited by radio frequency (RF) magnetron sputtering. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and ellipsometry were used to analyse the change in structure and stoichiometry of the coatings upon the change of the negative electrical bias (-50 V and -100 V) on the substrate. The chemical composition of the sputter-deposited coating was identical to the target. However, an increase in the negative electrical bias on the substrate led to a decrease of the coating thickness. In addition, the average size of the grains decreased from 55 ± 15 nm (grounded substrate) up to 30 ± 10 nm when an electrical bias of -100 V was applied.

Original languageEnglish
Pages (from-to)218-225
Number of pages8
JournalMaterialwissenschaft und Werkstofftechnik
Volume44
Issue number2-3
DOIs
Publication statusPublished - Feb 2013

Fingerprint

Phosphate coatings
calcium phosphates
Calcium phosphate
Silver
Stoichiometry
stoichiometry
radio frequencies
silver
coatings
Coatings
Substrates
Durapatite
Hydroxyapatite
Ellipsometry
Magnetron sputtering
X ray diffraction analysis
ellipsometry
magnetron sputtering
chemical composition
x rays

Keywords

  • antibacterial coating
  • calcium phosphate
  • implants
  • RF-magnetron sputtering
  • silver

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

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title = "Influence of the substrate bias on the stoichiometry and structure of RF-magnetron sputter-deposited silver-containing calcium phosphate coatings",
abstract = "A coating on the basis of silver-containing hydroxyapatite (silver-hydroxyapatite) was deposited by radio frequency (RF) magnetron sputtering. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and ellipsometry were used to analyse the change in structure and stoichiometry of the coatings upon the change of the negative electrical bias (-50 V and -100 V) on the substrate. The chemical composition of the sputter-deposited coating was identical to the target. However, an increase in the negative electrical bias on the substrate led to a decrease of the coating thickness. In addition, the average size of the grains decreased from 55 ± 15 nm (grounded substrate) up to 30 ± 10 nm when an electrical bias of -100 V was applied.",
keywords = "antibacterial coating, calcium phosphate, implants, RF-magnetron sputtering, silver",
author = "Ivanova, {A. A.} and Surmeneva, {M. A.} and Grubova, {I. Y.} and Sharonova, {A. A.} and Pichugin, {V. F.} and Chaikina, {M. V.} and V. Buck and O. Prymak and M. Epple and Surmenev, {R. A.}",
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T1 - Influence of the substrate bias on the stoichiometry and structure of RF-magnetron sputter-deposited silver-containing calcium phosphate coatings

AU - Ivanova, A. A.

AU - Surmeneva, M. A.

AU - Grubova, I. Y.

AU - Sharonova, A. A.

AU - Pichugin, V. F.

AU - Chaikina, M. V.

AU - Buck, V.

AU - Prymak, O.

AU - Epple, M.

AU - Surmenev, R. A.

PY - 2013/2

Y1 - 2013/2

N2 - A coating on the basis of silver-containing hydroxyapatite (silver-hydroxyapatite) was deposited by radio frequency (RF) magnetron sputtering. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and ellipsometry were used to analyse the change in structure and stoichiometry of the coatings upon the change of the negative electrical bias (-50 V and -100 V) on the substrate. The chemical composition of the sputter-deposited coating was identical to the target. However, an increase in the negative electrical bias on the substrate led to a decrease of the coating thickness. In addition, the average size of the grains decreased from 55 ± 15 nm (grounded substrate) up to 30 ± 10 nm when an electrical bias of -100 V was applied.

AB - A coating on the basis of silver-containing hydroxyapatite (silver-hydroxyapatite) was deposited by radio frequency (RF) magnetron sputtering. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and ellipsometry were used to analyse the change in structure and stoichiometry of the coatings upon the change of the negative electrical bias (-50 V and -100 V) on the substrate. The chemical composition of the sputter-deposited coating was identical to the target. However, an increase in the negative electrical bias on the substrate led to a decrease of the coating thickness. In addition, the average size of the grains decreased from 55 ± 15 nm (grounded substrate) up to 30 ± 10 nm when an electrical bias of -100 V was applied.

KW - antibacterial coating

KW - calcium phosphate

KW - implants

KW - RF-magnetron sputtering

KW - silver

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