Abstract
The results of investigating the plasma-immersion ion implantation of titanium into Zr–1Nb alloy from arc-discharge plasma are presented. The investigations are performed using 1.5-kV bias voltage applied to the sample by means of a coaxial plasma filter for 5, 15, and 30 min. Scanning electron and atomic-force microscopy data demonstrate that, after implantation, grains with sizes of ~50–100 nm and craters with lateral sizes varying from ~1 μm to vanishingly small values are detected on the surface. Energy-dispersive X-ray spectroscopy data indicate the formation of an oxide film under titanium implantation. It follows from X-ray diffraction analysis that implanted titanium is in the dissolved state and the crystal-lattice-parameter ratio c/a increases after ion implantation. The layer-by-layer elemental analysis of the implanted layer performed via optical emission spectroscopy is evidence that the titanium-concentration maximum is shifted to larger depths with incresing implantation duration.
Original language | English |
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Pages (from-to) | 452-457 |
Number of pages | 6 |
Journal | Journal of Surface Investigation |
Volume | 11 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1 Mar 2017 |
Keywords
- clusters
- implantation
- plasma filters
- vacuum-arc discharge
- zirconium alloy
ASJC Scopus subject areas
- Surfaces, Coatings and Films