Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides

A. D. Pogrebnjak, I. V. Yakushchenko, O. V. Sobol’, V. M. Beresnev, A. I. Kupchishin, O. V. Bondar, M. A. Lisovenko, H. Amekura, K. Kono, K. Oyoshi, Y. Takeda

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The nitrides of high-entropy alloys, (TiZrAlYNb)N, fabricated by cathodic vacuum arc evaporation are studied with electron microscopy, atomic force microscopy, laser scanning microscopy; energy-dispersive X-ray analysis, X-ray phase analysis, time-of-flight secondary-ion mass spectrometry; and hardness measurements. It is found that the deposition parameters influence the structure, surface morphology, element distribution, and mechanical properties. The structural—phase state of the coatings before and after the ion implantation of heavy negative gold ions Au are compared.

Original languageEnglish
Pages (from-to)1176-1183
Number of pages8
JournalTechnical Physics
Issue number8
Publication statusPublished - 17 Aug 2015
Externally publishedYes


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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