Abstract
In this study, nanostructured hydroxyapatite (HA) coatings were deposited at a constant power via radio frequency magnetron sputtering. Substrate rotation was applied to increase the uniformity of the thin film properties. The crystallographic orientation, composition and microstructure of the coatings were examined. The characteristics of the deposited coatings associated with the applied deposition conditions were evaluated as a function of time that the samples spent under the target racetrack. The obtained thin films exhibit a change in out-of-plane orientation from preferential (002) to (300) and an increase in the Ca/P molar ratio when exposed for a longer time under the racetrack. This introduces the possibility of tuning crystallographic orientations of HA coatings.
| Original language | English |
|---|---|
| Pages (from-to) | 368-374 |
| Number of pages | 7 |
| Journal | Thin Solid Films |
| Volume | 591 |
| DOIs | |
| Publication status | Published - 1 Jan 2015 |
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Keywords
- Hydroxyapatite
- RF-magnetron sputtering
- Substrate rotation
- Texture
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Materials Chemistry
- Metals and Alloys
- Surfaces, Coatings and Films
- Surfaces and Interfaces
Cite this
Influence of deposition conditions on the composition, texture and microstructure of RF-magnetron sputter-deposited hydroxyapatite thin films. / Ivanova, A. A.; Surmeneva, M. A.; Surmenev, R. A.; Depla, D.
In: Thin Solid Films, Vol. 591, 01.01.2015, p. 368-374.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Influence of deposition conditions on the composition, texture and microstructure of RF-magnetron sputter-deposited hydroxyapatite thin films
AU - Ivanova, A. A.
AU - Surmeneva, M. A.
AU - Surmenev, R. A.
AU - Depla, D.
PY - 2015/1/1
Y1 - 2015/1/1
N2 - In this study, nanostructured hydroxyapatite (HA) coatings were deposited at a constant power via radio frequency magnetron sputtering. Substrate rotation was applied to increase the uniformity of the thin film properties. The crystallographic orientation, composition and microstructure of the coatings were examined. The characteristics of the deposited coatings associated with the applied deposition conditions were evaluated as a function of time that the samples spent under the target racetrack. The obtained thin films exhibit a change in out-of-plane orientation from preferential (002) to (300) and an increase in the Ca/P molar ratio when exposed for a longer time under the racetrack. This introduces the possibility of tuning crystallographic orientations of HA coatings.
AB - In this study, nanostructured hydroxyapatite (HA) coatings were deposited at a constant power via radio frequency magnetron sputtering. Substrate rotation was applied to increase the uniformity of the thin film properties. The crystallographic orientation, composition and microstructure of the coatings were examined. The characteristics of the deposited coatings associated with the applied deposition conditions were evaluated as a function of time that the samples spent under the target racetrack. The obtained thin films exhibit a change in out-of-plane orientation from preferential (002) to (300) and an increase in the Ca/P molar ratio when exposed for a longer time under the racetrack. This introduces the possibility of tuning crystallographic orientations of HA coatings.
KW - Hydroxyapatite
KW - RF-magnetron sputtering
KW - Substrate rotation
KW - Texture
UR - http://www.scopus.com/inward/record.url?scp=84942831095&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84942831095&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2015.03.058
DO - 10.1016/j.tsf.2015.03.058
M3 - Article
AN - SCOPUS:84942831095
VL - 591
SP - 368
EP - 374
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
ER -