Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams

Abstract

The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.

Original language	English
Title of host publication	15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
Pages	643-646
Number of pages	4
Publication status	Published - 2004
Event	15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation Duration: 18 Jul 2004 → 23 Jul 2004

Other

Other	15th International Conference on High-Power Particle Beams, BEAMS-2004
Country	Russian Federation
City	St. Petersburg
Period	18.7.04 → 23.7.04

ASJC Scopus subject areas

Nuclear and High Energy Physics

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Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams. / Struts, Vasily K.; Matvienko, Vasily M.; Ryabchikov, Alexandr I.; Petrov, Anatoli V.; Shlapakovski, Anatoli S.

15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. p. 643-646 6220627.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Struts, VK, Matvienko, VM, Ryabchikov, AI, Petrov, AV & Shlapakovski, AS 2004, Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams. in 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004., 6220627, pp. 643-646, 15th International Conference on High-Power Particle Beams, BEAMS-2004, St. Petersburg, Russian Federation, 18.7.04.

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abstract = "The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.",

author = "Struts, {Vasily K.} and Matvienko, {Vasily M.} and Ryabchikov, {Alexandr I.} and Petrov, {Anatoli V.} and Shlapakovski, {Anatoli S.}",

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AU - Struts, Vasily K.

AU - Matvienko, Vasily M.

AU - Ryabchikov, Alexandr I.

AU - Petrov, Anatoli V.

AU - Shlapakovski, Anatoli S.

PY - 2004

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N2 - The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.

AB - The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.

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Y2 - 18 July 2004 through 23 July 2004

ER -

Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams

Abstract

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ASJC Scopus subject areas

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