Abstract
The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.
| Original language | English |
|---|---|
| Title of host publication | 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004 |
| Pages | 643-646 |
| Number of pages | 4 |
| Publication status | Published - 2004 |
| Event | 15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation Duration: 18 Jul 2004 → 23 Jul 2004 |
Other
| Other | 15th International Conference on High-Power Particle Beams, BEAMS-2004 |
|---|---|
| Country | Russian Federation |
| City | St. Petersburg |
| Period | 18.7.04 → 23.7.04 |
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ASJC Scopus subject areas
- Nuclear and High Energy Physics
Cite this
Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams. / Struts, Vasily K.; Matvienko, Vasily M.; Ryabchikov, Alexandr I.; Petrov, Anatoli V.; Shlapakovski, Anatoli S.
15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. p. 643-646 6220627.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams
AU - Struts, Vasily K.
AU - Matvienko, Vasily M.
AU - Ryabchikov, Alexandr I.
AU - Petrov, Anatoli V.
AU - Shlapakovski, Anatoli S.
PY - 2004
Y1 - 2004
N2 - The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.
AB - The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.
UR - http://www.scopus.com/inward/record.url?scp=84864230100&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84864230100&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84864230100
SN - 5879110885
SN - 9785879110883
SP - 643
EP - 646
BT - 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
ER -