Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams

Vasily K. Struts, Vasily M. Matvienko, Alexandr I. Ryabchikov, Anatoli V. Petrov, Anatoli S. Shlapakovski

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.

Original languageEnglish
Title of host publication15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
Pages643-646
Number of pages4
Publication statusPublished - 2004
Event15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation
Duration: 18 Jul 200423 Jul 2004

Other

Other15th International Conference on High-Power Particle Beams, BEAMS-2004
CountryRussian Federation
CitySt. Petersburg
Period18.7.0423.7.04

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

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    Struts, V. K., Matvienko, V. M., Ryabchikov, A. I., Petrov, A. V., & Shlapakovski, A. S. (2004). Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams. In 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004 (pp. 643-646). [6220627]