Abstract
The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.
| Original language | English |
|---|---|
| Title of host publication | 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004 |
| Pages | 643-646 |
| Number of pages | 4 |
| Publication status | Published - 2004 |
| Event | 15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation Duration: 18 Jul 2004 → 23 Jul 2004 |
Other
| Other | 15th International Conference on High-Power Particle Beams, BEAMS-2004 |
|---|---|
| Country | Russian Federation |
| City | St. Petersburg |
| Period | 18.7.04 → 23.7.04 |
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ASJC Scopus subject areas
- Nuclear and High Energy Physics
Cite this
Struts, V. K., Matvienko, V. M., Ryabchikov, A. I., Petrov, A. V., & Shlapakovski, A. S. (2004). Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams. In 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004 (pp. 643-646). [6220627]