Abstract
This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.
| Original language | English |
|---|---|
| Pages (from-to) | 343-354 |
| Number of pages | 12 |
| Journal | Journal of Materials Engineering and Performance |
| Volume | 28 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 2019 |
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Keywords
- cathodic arc deposition
- nanohardness
- TiCN coatings
- XRD analysis
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
Cite this
Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method. / Petkov, Nikolay; Kashkarov, Egor; Obrosov, Aleksei; Bakalova, Totka; Kejzlar, Pavel; Bahchedzhiev, Hristo.
In: Journal of Materials Engineering and Performance, Vol. 28, No. 1, 01.01.2019, p. 343-354.Research output: Contribution to journal › Review article
}
TY - JOUR
T1 - Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method
AU - Petkov, Nikolay
AU - Kashkarov, Egor
AU - Obrosov, Aleksei
AU - Bakalova, Totka
AU - Kejzlar, Pavel
AU - Bahchedzhiev, Hristo
PY - 2019/1/1
Y1 - 2019/1/1
N2 - This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.
AB - This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.
KW - cathodic arc deposition
KW - nanohardness
KW - TiCN coatings
KW - XRD analysis
UR - http://www.scopus.com/inward/record.url?scp=85056487116&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85056487116&partnerID=8YFLogxK
U2 - 10.1007/s11665-018-3754-3
DO - 10.1007/s11665-018-3754-3
M3 - Review article
AN - SCOPUS:85056487116
VL - 28
SP - 343
EP - 354
JO - Journal of Materials Engineering and Performance
JF - Journal of Materials Engineering and Performance
SN - 1059-9495
IS - 1
ER -