Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method

Abstract

This article presents a study of the influence of the bias voltage and CH₄/N₂ gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH₄ and N₂ gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.

Original language	English
Pages (from-to)	343-354
Number of pages	12
Journal	Journal of Materials Engineering and Performance
Volume	28
Issue number	1
DOIs	https://doi.org/10.1007/s11665-018-3754-3
Publication status	Published - 1 Jan 2019

Keywords

cathodic arc deposition
nanohardness
TiCN coatings
XRD analysis

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1007/s11665-018-3754-3

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Influence of Bias Voltage and CH₄/N₂ Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method. / Petkov, Nikolay; Kashkarov, Egor; Obrosov, Aleksei; Bakalova, Totka; Kejzlar, Pavel; Bahchedzhiev, Hristo.

In: Journal of Materials Engineering and Performance, Vol. 28, No. 1, 01.01.2019, p. 343-354.

Research output: Contribution to journal › Review article › peer-review

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title = "Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method",

abstract = "This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.",

keywords = "cathodic arc deposition, nanohardness, TiCN coatings, XRD analysis",

author = "Nikolay Petkov and Egor Kashkarov and Aleksei Obrosov and Totka Bakalova and Pavel Kejzlar and Hristo Bahchedzhiev",

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AU - Petkov, Nikolay

AU - Kashkarov, Egor

AU - Obrosov, Aleksei

AU - Bakalova, Totka

AU - Kejzlar, Pavel

AU - Bahchedzhiev, Hristo

PY - 2019/1/1

Y1 - 2019/1/1

N2 - This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.

AB - This article presents a study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings. The coatings are deposited by cathodic arc deposition technology from Ti cathodes under an atmosphere of a mixture of CH4 and N2 gasses. XRD analysis shows that an increase in the methane flow changes the preferential orientation of the coating from (111) to (200) and results in a refinement of the structure (grain size reduction from 23 to 7 nm). SEM analysis shows that the coatings are stoichiometric. It was demonstrated that the bias voltage has an influence on the grain size, hardness and elasticity module. The highest hardness value of 52.5 GPa was measured at the coatings lacking a clear preferential orientation. The adhesion of the coatings showed a critical load in the range of 29-64 N.

KW - cathodic arc deposition

KW - nanohardness

KW - TiCN coatings

KW - XRD analysis

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EP - 354

JO - Journal of Materials Engineering and Performance

JF - Journal of Materials Engineering and Performance

SN - 1059-9495

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Influence of Bias Voltage and CH₄/N₂ Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method

Abstract

Keywords

ASJC Scopus subject areas

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