Hydrogen determination in silicon nitride films by the nuclear recoil method

I. P. Chernov, V. N. Shadrin, Ju P. Cherdantsev, V. N. Sulema, L. V. Chramova, T. P. Smirnova, V. I. Belyi

Division for Experimental Physics

Research output: Contribution to journal › Article

Abstract

The highly sensitive nuclear recoil method was used to determine the hydrogen concentration in silicon nitride films deposited by the ammonolysis of monosilane. Combination of the data obtained using this method with internal reflection spectroscopy data allowed us to estimate the absorption cross section ε(λ = 3.3 μm) for the NH bonds present in the films. The value of (5.9±1.2) × 10^-20 cm² obtained for ε(λ = 3.3 μm) is more reliable than values reported previously.

Original language	English
Pages (from-to)	49-54
Number of pages	6
Journal	Thin Solid Films
Volume	88
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(82)90349-2
Publication status	Published - 5 Feb 1982

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ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

Cite this

Chernov, I. P., Shadrin, V. N., Cherdantsev, J. P., Sulema, V. N., Chramova, L. V., Smirnova, T. P., & Belyi, V. I. (1982). Hydrogen determination in silicon nitride films by the nuclear recoil method. Thin Solid Films, 88(1), 49-54. https://doi.org/10.1016/0040-6090(82)90349-2

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abstract = "The highly sensitive nuclear recoil method was used to determine the hydrogen concentration in silicon nitride films deposited by the ammonolysis of monosilane. Combination of the data obtained using this method with internal reflection spectroscopy data allowed us to estimate the absorption cross section ε(λ = 3.3 μm) for the NH bonds present in the films. The value of (5.9±1.2) × 10-20 cm2 obtained for ε(λ = 3.3 μm) is more reliable than values reported previously.",

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AU - Chernov, I. P.

AU - Shadrin, V. N.

AU - Cherdantsev, Ju P.

AU - Sulema, V. N.

AU - Chramova, L. V.

AU - Smirnova, T. P.

AU - Belyi, V. I.

PY - 1982/2/5

Y1 - 1982/2/5

N2 - The highly sensitive nuclear recoil method was used to determine the hydrogen concentration in silicon nitride films deposited by the ammonolysis of monosilane. Combination of the data obtained using this method with internal reflection spectroscopy data allowed us to estimate the absorption cross section ε(λ = 3.3 μm) for the NH bonds present in the films. The value of (5.9±1.2) × 10-20 cm2 obtained for ε(λ = 3.3 μm) is more reliable than values reported previously.

AB - The highly sensitive nuclear recoil method was used to determine the hydrogen concentration in silicon nitride films deposited by the ammonolysis of monosilane. Combination of the data obtained using this method with internal reflection spectroscopy data allowed us to estimate the absorption cross section ε(λ = 3.3 μm) for the NH bonds present in the films. The value of (5.9±1.2) × 10-20 cm2 obtained for ε(λ = 3.3 μm) is more reliable than values reported previously.

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10.1016/0040-6090(82)90349-2