High-voltage microsecond pulse generator for plasma immersion ion implantation

V. A. Vizir, V. B. Zorin, S. V. Ivanov, B. M. Kovalchuk, A. D. Maksimenko, V. I. Maniiov, G. V. Smorudov, N. G. Shubkin, V. V. Chervyakov

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

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    Physics & Astronomy

    Engineering & Materials Science