High-rate magnetron sputtering with hot target

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Chromium films were deposited by cooled and hot target magnetron sputtering techniques with unbalanced magnetic field configuration at equal target power density. The dependence of deposition rates of Cr films by the hot target magnetron sputtering on the power density was a non-linear at 27.5-31.5W/cm2. The optical emission studies indicated the enhancement of deposition rates due to the evaporation of the hot Cr target. The chromium film structure was strongly depended on the factor of «hot target» and the target power density. Cr films were structured to (110) direction in the case of the hot target sputtering, for cooled target configuration - the preferred orientation was changed from (110) to (200) with the power density. Cr+ to Cr ratio and heat flow from the cathode to the substrate influenced on the coating hardness and adhesion. The Cr films with 9.84-12.79GPa and the non-cracking behavior (up to 15N) were obtained.

Original languageEnglish
Pages (from-to)168-173
Number of pages6
JournalSurface and Coatings Technology
Volume308
DOIs
Publication statusAccepted/In press - 31 Mar 2016

Keywords

  • Chromium film
  • Evaporation
  • High-rate magnetron sputtering
  • Hot target

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'High-rate magnetron sputtering with hot target'. Together they form a unique fingerprint.

  • Cite this