High-power pulsed sputtering using a magnetron with enhanced plasma confinement

Jaroslav Vlček, Pavel Kudláček, Kristýna Burcalová, Jindr̂ich Musil

Research output: Contribution to journalArticle

62 Citations (Scopus)

Abstract

High-power pulsed dc magnetron discharges for ionized high-rate sputtering of metallic films were systematically investigated. The depositions were performed using two unbalanced circular magnetrons of different types with a directly water-cooled planar copper target of 100 mm in diameter. The repetition frequency was 1 kHz at a fixed 20% duty cycle and an argon pressure of 0.5 Pa. Time evolutions of the discharge characteristics were measured to provide information on absorption of energy in the discharge plasma and on transfer of arising ions to the substrate at a target power density in a pulse up to 950 W cm2. Time-averaged mass spectroscopy was performed at the substrate position to characterize ion energy distributions and composition of total ion fluxes onto the substrate. The deposition rate of the copper films formed on a floating substrate at the distance of 100 mm from the target was 2.2 μmmin at an average target power density over a pulse period of 96 W cm2. Very effective ionization of sputtered copper atoms resulted in a strong predominance of copper ions (up to 92%) in total ion fluxes onto the substrate. Trends in measured values of the deposition rate per average target power density and the ionized fraction of sputtered copper atoms in the flux onto the substrate (up to 56%) were explained on the basis of model predictions.

Original languageEnglish
Pages (from-to)42-47
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume25
Issue number1
DOIs
Publication statusPublished - 19 Jan 2007

Fingerprint

Plasma confinement
plasma control
Sputtering
sputtering
Copper
Ions
Substrates
copper
radiant flux density
Fluxes
ions
Deposition rates
Magnetrons
magnetrons
Atoms
Metallic films
Argon
Energy absorption
pulses
plasma jets

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

High-power pulsed sputtering using a magnetron with enhanced plasma confinement. / Vlček, Jaroslav; Kudláček, Pavel; Burcalová, Kristýna; Musil, Jindr̂ich.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 25, No. 1, 19.01.2007, p. 42-47.

Research output: Contribution to journalArticle

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